TY - JOUR
T1 - Humidity-sensitive properties of titania films prepared using the sol-gel process
AU - Gusmano, Gualtiero
AU - Montesprelli, Giampiero
AU - Nunzianate, Patrizia
AU - Traversa, Enrico
AU - Montenero, Angelo
AU - Braghini, Marco
AU - Mattogno, Giulia
AU - Bearzotti, Andrea
PY - 1993
Y1 - 1993
N2 - TiO2 films, as well as powders as reference, were prepared using the sol-gel process, using titanium isopropylalkoxide (TIPT) as a precursor. The films were deposited on glass and heated either to 300°C or 500°C. The morphology of the film surface was observed using scanning electron microscopy (SEM). Fourier transform infrared (FTIR) spectroscopy, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and electrochemical impedence spectroscopy (EIS) at different relative humidities were carried out to study the possibility of using sol-gel processed titania films as detecting elements in humidity sensors. A good resistance versus relative humidity (rh) sensitivity was observed in the range from 50% to 85% rh. The response time of titania films was rather fast, estimated in a few seconds.
AB - TiO2 films, as well as powders as reference, were prepared using the sol-gel process, using titanium isopropylalkoxide (TIPT) as a precursor. The films were deposited on glass and heated either to 300°C or 500°C. The morphology of the film surface was observed using scanning electron microscopy (SEM). Fourier transform infrared (FTIR) spectroscopy, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and electrochemical impedence spectroscopy (EIS) at different relative humidities were carried out to study the possibility of using sol-gel processed titania films as detecting elements in humidity sensors. A good resistance versus relative humidity (rh) sensitivity was observed in the range from 50% to 85% rh. The response time of titania films was rather fast, estimated in a few seconds.
UR - http://www.scopus.com/inward/record.url?scp=0027677889&partnerID=8YFLogxK
U2 - 10.2109/jcersj.101.1095
DO - 10.2109/jcersj.101.1095
M3 - Article
AN - SCOPUS:0027677889
SN - 0914-5400
VL - 101
SP - 1095
EP - 1100
JO - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
JF - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
IS - 1178
ER -