Humidity-sensitive properties of titania films prepared using the sol-gel process

Gualtiero Gusmano*, Giampiero Montesprelli, Patrizia Nunzianate, Enrico Traversa, Angelo Montenero, Marco Braghini, Giulia Mattogno, Andrea Bearzotti

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

56 Scopus citations


TiO2 films, as well as powders as reference, were prepared using the sol-gel process, using titanium isopropylalkoxide (TIPT) as a precursor. The films were deposited on glass and heated either to 300°C or 500°C. The morphology of the film surface was observed using scanning electron microscopy (SEM). Fourier transform infrared (FTIR) spectroscopy, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and electrochemical impedence spectroscopy (EIS) at different relative humidities were carried out to study the possibility of using sol-gel processed titania films as detecting elements in humidity sensors. A good resistance versus relative humidity (rh) sensitivity was observed in the range from 50% to 85% rh. The response time of titania films was rather fast, estimated in a few seconds.

Original languageEnglish (US)
Pages (from-to)1095-1100
Number of pages6
JournalNippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
Issue number1178
StatePublished - 1993
Externally publishedYes

ASJC Scopus subject areas

  • Ceramics and Composites
  • General Chemistry
  • Condensed Matter Physics
  • Materials Chemistry


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