Abstract
TiO2 films, as well as powders as reference, were prepared using the sol-gel process, using titanium isopropylalkoxide (TIPT) as a precursor. The films were deposited on glass and heated either to 300°C or 500°C. The morphology of the film surface was observed using scanning electron microscopy (SEM). Fourier transform infrared (FTIR) spectroscopy, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and electrochemical impedence spectroscopy (EIS) at different relative humidities were carried out to study the possibility of using sol-gel processed titania films as detecting elements in humidity sensors. A good resistance versus relative humidity (rh) sensitivity was observed in the range from 50% to 85% rh. The response time of titania films was rather fast, estimated in a few seconds.
Original language | English (US) |
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Pages (from-to) | 1095-1100 |
Number of pages | 6 |
Journal | Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan |
Volume | 101 |
Issue number | 1178 |
DOIs | |
State | Published - 1993 |
Externally published | Yes |
ASJC Scopus subject areas
- Ceramics and Composites
- General Chemistry
- Condensed Matter Physics
- Materials Chemistry