Impact of scaling on the performance and reliability degradation of metal-contacts in NEMS devices

Keyphrases

• Reliability Degradation 100%
• Metal Contact 100%
• Performance Degradation 100%
• Stiction 33%
• Contact Degradation 16%
• Contact Resistance 16%
• Modeling Results 16%
• Mechanical Properties of Metals 16%
• Surface Forces 16%
• Scaling Analysis 16%
• Logic Design 16%
• Gold Contact 16%
• Contact Surface 16%
• Contact Properties 16%
• Intermolecular Forces 16%
• Van Der Waals Force 16%
• Operating Voltage 16%
• Device Scaling 16%
• Elastic-plastic Deformation 16%
• Contact Area 16%
• Mating Surfaces 16%
• Supply Voltage 16%
• Wearout 16%
• Physical Dimension 16%
• Modeling Environment 16%
• Capillary Force 16%

Engineering

• Metal Contact 100%
• Mechanical Switch 100%
• Stiction 33%
• Simulation Result 16%
• Capillary Force 16%
• Operating Voltage 16%
• Applicability 16%
• Major Problem 16%
• Critical Role 16%
• Modeling Environment 16%
• Contact Area 16%
• Measurement Data 16%
• Contact Surface 16%
• Analytical Study 16%
• Plastic Deformation 16%
• Demonstrates 16%
• Tasks 16%
• Logic Design 16%
• Mating Surface 16%
• Contacting Asperity 16%
• Device Scaling 16%
• Supply Voltage 16%

Material Science

• Contact Area 100%
• Contact Resistance 100%
• Plastic Deformation 100%
• Transistor 100%