Improving the electrical performance of a conductive atomic force microscope with a logarithmic current-to-voltage converter

L. Aguilera; M. Lanza; M. Porti; J. Grifoll; M. Nafría; X. Aymerich

doi:10.1063/1.2952058

Improving the electrical performance of a conductive atomic force microscope with a logarithmic current-to-voltage converter

L. Aguilera, M. Lanza, M. Porti, J. Grifoll, M. Nafría, X. Aymerich

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

A new configuration of conductive atomic force microscope (CAFM) is presented, which is based in a standard CAFM where the typical I-V converter has been replaced by a log I-V amplifier. This substitution extends the current dynamic range from 1-100 pA to 1 pA-1 mA. With the broadening of the current dynamic range, the CAFM can access new applications, such as the reliability evaluation of metal-oxide-semiconductor gate dielectrics. As an example, the setup has been tested by analyzing breakdown spots induced in Si O2 layers. © 2008 American Institute of Physics.

Original language	English (US)
Journal	Review of Scientific Instruments
Volume	79
Issue number	7
DOIs	https://doi.org/10.1063/1.2952058
State	Published - Aug 15 2008
Externally published	Yes

ASJC Scopus subject areas

Instrumentation

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10.1063/1.2952058

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title = "Improving the electrical performance of a conductive atomic force microscope with a logarithmic current-to-voltage converter",

abstract = "A new configuration of conductive atomic force microscope (CAFM) is presented, which is based in a standard CAFM where the typical I-V converter has been replaced by a log I-V amplifier. This substitution extends the current dynamic range from 1-100 pA to 1 pA-1 mA. With the broadening of the current dynamic range, the CAFM can access new applications, such as the reliability evaluation of metal-oxide-semiconductor gate dielectrics. As an example, the setup has been tested by analyzing breakdown spots induced in Si O2 layers. {\textcopyright} 2008 American Institute of Physics.",

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AU - Aguilera, L.

AU - Lanza, M.

AU - Porti, M.

AU - Grifoll, J.

AU - Nafría, M.

AU - Aymerich, X.

N1 - Generated from Scopus record by KAUST IRTS on 2021-03-16

PY - 2008/8/15

Y1 - 2008/8/15

N2 - A new configuration of conductive atomic force microscope (CAFM) is presented, which is based in a standard CAFM where the typical I-V converter has been replaced by a log I-V amplifier. This substitution extends the current dynamic range from 1-100 pA to 1 pA-1 mA. With the broadening of the current dynamic range, the CAFM can access new applications, such as the reliability evaluation of metal-oxide-semiconductor gate dielectrics. As an example, the setup has been tested by analyzing breakdown spots induced in Si O2 layers. © 2008 American Institute of Physics.

AB - A new configuration of conductive atomic force microscope (CAFM) is presented, which is based in a standard CAFM where the typical I-V converter has been replaced by a log I-V amplifier. This substitution extends the current dynamic range from 1-100 pA to 1 pA-1 mA. With the broadening of the current dynamic range, the CAFM can access new applications, such as the reliability evaluation of metal-oxide-semiconductor gate dielectrics. As an example, the setup has been tested by analyzing breakdown spots induced in Si O2 layers. © 2008 American Institute of Physics.

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M3 - Article

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JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 7

ER -

Improving the electrical performance of a conductive atomic force microscope with a logarithmic current-to-voltage converter

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