In-line control and rapid process development of nitrided gate oxides

Duncan Rogers*, Tapani Laaksonen, Ajith Varghese, Christian Otten, Mike Kasner, Husam Alshareef, Richard Kuan, Malcolm Bevan

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Engineering

Material Science

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