Influence of the manufacturing process on the electrical properties of thin (

M. Lanza; M. Porti; M. Nafria; G. Benstetter; W. Frammelsberger; H. Ranzinger; E. Lodermeier; G. Jaschke

doi:10.1016/j.microrel.2007.07.045

Influence of the manufacturing process on the electrical properties of thin (

M. Lanza, M. Porti, M. Nafria, G. Benstetter, W. Frammelsberger, H. Ranzinger, E. Lodermeier, G. Jaschke

Research output: Contribution to journal › Article › peer-review

30 Scopus citations

Abstract

In this work, the dependence of the electrical characteristics of some thin (

Original language	English (US)
Pages (from-to)	1424-1428
Number of pages	5
Journal	Microelectronics Reliability
Volume	47
Issue number	9-11 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.microrel.2007.07.045
State	Published - Aug 1 2007
Externally published	Yes

ASJC Scopus subject areas

Surfaces, Coatings and Films
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering
Safety, Risk, Reliability and Quality
Condensed Matter Physics

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10.1016/j.microrel.2007.07.045

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title = "Influence of the manufacturing process on the electrical properties of thin (",

abstract = "In this work, the dependence of the electrical characteristics of some thin (",

author = "M. Lanza and M. Porti and M. Nafria and G. Benstetter and W. Frammelsberger and H. Ranzinger and E. Lodermeier and G. Jaschke",

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T1 - Influence of the manufacturing process on the electrical properties of thin (

AU - Lanza, M.

AU - Porti, M.

AU - Nafria, M.

AU - Benstetter, G.

AU - Frammelsberger, W.

AU - Ranzinger, H.

AU - Lodermeier, E.

AU - Jaschke, G.

N1 - Generated from Scopus record by KAUST IRTS on 2021-03-16

PY - 2007/8/1

Y1 - 2007/8/1

N2 - In this work, the dependence of the electrical characteristics of some thin (

AB - In this work, the dependence of the electrical characteristics of some thin (

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U2 - 10.1016/j.microrel.2007.07.045

DO - 10.1016/j.microrel.2007.07.045

M3 - Article

SN - 0026-2714

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SP - 1424

EP - 1428

JO - Microelectronics Reliability

JF - Microelectronics Reliability

IS - 9-11 SPEC. ISS.

ER -

Influence of the manufacturing process on the electrical properties of thin (

Abstract

ASJC Scopus subject areas

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