TY - GEN
T1 - Initially Imperfect MEMS Microplates Under Electrostatic Actuation: Theory and Experiment
AU - Saghir, Shahid
AU - Bellaredj, Mohammed Lamine Faycal
AU - Younis, Mohammad I.
N1 - KAUST Repository Item: Exported on 2020-10-01
PY - 2016/12/5
Y1 - 2016/12/5
N2 - Microplates are building blocks of many Micro-Electro-Mechanical Systems (MEMS). It is common for them to undergo imperfections due to residual stresses caused by the micro fabrication process. Such plates are essentially different from perfectly flat plates and cannot be modeled using the governing equations of flat plates. In this article, we adopt the governing equations of imperfect plates employing the modified von-Karman strains. These equations then are used to develop a Reduced Order Model based on the Galerkin procedure to simulate the static and dynamic behavior of an electrostatically actuated microplate. Also, microplates made of silicon nitride are fabricated and tested. First, the static behaviour of the microplate is investigated when applying a static voltage Vdc. To study the dynamic behaviour we apply a harmonic voltage, Vac, superimposed to Vdc. Simulation results show good agreement with the experimentally measured responses.
AB - Microplates are building blocks of many Micro-Electro-Mechanical Systems (MEMS). It is common for them to undergo imperfections due to residual stresses caused by the micro fabrication process. Such plates are essentially different from perfectly flat plates and cannot be modeled using the governing equations of flat plates. In this article, we adopt the governing equations of imperfect plates employing the modified von-Karman strains. These equations then are used to develop a Reduced Order Model based on the Galerkin procedure to simulate the static and dynamic behavior of an electrostatically actuated microplate. Also, microplates made of silicon nitride are fabricated and tested. First, the static behaviour of the microplate is investigated when applying a static voltage Vdc. To study the dynamic behaviour we apply a harmonic voltage, Vac, superimposed to Vdc. Simulation results show good agreement with the experimentally measured responses.
UR - http://hdl.handle.net/10754/623232
UR - http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2592166
U2 - 10.1115/detc2016-59838
DO - 10.1115/detc2016-59838
M3 - Conference contribution
SN - 9780791850206
BT - Volume 8: 28th Conference on Mechanical Vibration and Noise
PB - ASME International
ER -