Integrity analysis of electrically actuated resonators with delayed feedback controller

Fadi Alsaleem, Mohammad Younis

Research output: Contribution to journalArticlepeer-review

26 Scopus citations


In this work, we investigate the stability and integrity of parallel-plate microelectromechanical systems resonators using a delayed feedback controller. Two case studies are investigated: a capacitive sensor made of cantilever beams with a proof mass at their tip and a clamped-clamped microbeam. Dover-cliff integrity curves and basin-of-attraction analysis are used for the stability assessment of the frequency response of the resonators for several scenarios of positive and negative gain in the controller. It is found that in the case of a positive gain, a velocity or a displacement feedback controller can be used to effectively enhance the stability of the resonators. This is confirmed by an increase in the area of the basin of attraction of the resonator and in shifting the Dover-cliff curve to higher values. On the other hand, it is shown that a negative gain can significantly weaken the stability and integrity of the resonators. This can be of useful use in MEMS for actuation applications, such as in the case of capacitive switches, to lower the activation voltage of these devices and to ensure their trigger under all initial conditions.

Original languageEnglish (US)
Article number031011
JournalJournal of Dynamic Systems, Measurement and Control, Transactions of the ASME
Issue number3
StatePublished - May 3 2011

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Information Systems
  • Instrumentation
  • Mechanical Engineering
  • Computer Science Applications


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