Internal resonance of a U-shaped microresonator for gas sensing

Wagner B. Lenz; Rodrigo T. Rocha; Fahimullah Khan; Carlos A. Grande; Mohammad I. Younis

doi:10.1007/s11071-024-10571-5

Internal resonance of a U-shaped microresonator for gas sensing

Wagner B. Lenz, Rodrigo T. Rocha, Fahimullah Khan, Carlos A. Grande^*, Mohammad I. Younis^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

In this work, we present an investigation into the 2:1 internal resonance and saturation phenomena in a compound micromachined U-shaped portal frame MEMS device and its potential exploitation for gas detection. The portal frame design accounts for the quadratic geometric nonlinearity, which yields mode coupling between the first and second modes of vibration of the structure. Experimental results are shown for the activation of the 2:1 internal resonance when varying the electrostatic loads or when exposing the structures to gases of various levels of viscosity. The experimental data are supported by the results of analytical and finite element models.

Original language	English (US)
Journal	Nonlinear Dynamics
DOIs	https://doi.org/10.1007/s11071-024-10571-5
State	Accepted/In press - 2024

Keywords

Compound structure
Gas sensing
MEMS resonator
Saturation phenomenon
Two-to-one internal resonance

ASJC Scopus subject areas

Control and Systems Engineering
Aerospace Engineering
Ocean Engineering
Mechanical Engineering
Electrical and Electronic Engineering
Applied Mathematics

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10.1007/s11071-024-10571-5

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title = "Internal resonance of a U-shaped microresonator for gas sensing",

abstract = "In this work, we present an investigation into the 2:1 internal resonance and saturation phenomena in a compound micromachined U-shaped portal frame MEMS device and its potential exploitation for gas detection. The portal frame design accounts for the quadratic geometric nonlinearity, which yields mode coupling between the first and second modes of vibration of the structure. Experimental results are shown for the activation of the 2:1 internal resonance when varying the electrostatic loads or when exposing the structures to gases of various levels of viscosity. The experimental data are supported by the results of analytical and finite element models.",

keywords = "Compound structure, Gas sensing, MEMS resonator, Saturation phenomenon, Two-to-one internal resonance",

author = "Lenz, {Wagner B.} and Rocha, {Rodrigo T.} and Fahimullah Khan and Grande, {Carlos A.} and Younis, {Mohammad I.}",

note = "Publisher Copyright: {\textcopyright} The Author(s), under exclusive licence to Springer Nature B.V. 2024.",

year = "2024",

doi = "10.1007/s11071-024-10571-5",

language = "English (US)",

journal = "Nonlinear Dynamics",

issn = "0924-090X",

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T1 - Internal resonance of a U-shaped microresonator for gas sensing

AU - Lenz, Wagner B.

AU - Rocha, Rodrigo T.

AU - Khan, Fahimullah

AU - Grande, Carlos A.

AU - Younis, Mohammad I.

N1 - Publisher Copyright: © The Author(s), under exclusive licence to Springer Nature B.V. 2024.

PY - 2024

Y1 - 2024

N2 - In this work, we present an investigation into the 2:1 internal resonance and saturation phenomena in a compound micromachined U-shaped portal frame MEMS device and its potential exploitation for gas detection. The portal frame design accounts for the quadratic geometric nonlinearity, which yields mode coupling between the first and second modes of vibration of the structure. Experimental results are shown for the activation of the 2:1 internal resonance when varying the electrostatic loads or when exposing the structures to gases of various levels of viscosity. The experimental data are supported by the results of analytical and finite element models.

AB - In this work, we present an investigation into the 2:1 internal resonance and saturation phenomena in a compound micromachined U-shaped portal frame MEMS device and its potential exploitation for gas detection. The portal frame design accounts for the quadratic geometric nonlinearity, which yields mode coupling between the first and second modes of vibration of the structure. Experimental results are shown for the activation of the 2:1 internal resonance when varying the electrostatic loads or when exposing the structures to gases of various levels of viscosity. The experimental data are supported by the results of analytical and finite element models.

KW - Compound structure

KW - Gas sensing

KW - MEMS resonator

KW - Saturation phenomenon

KW - Two-to-one internal resonance

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U2 - 10.1007/s11071-024-10571-5

DO - 10.1007/s11071-024-10571-5

M3 - Article

AN - SCOPUS:85209145830

SN - 0924-090X

JO - Nonlinear Dynamics

JF - Nonlinear Dynamics

ER -

Internal resonance of a U-shaped microresonator for gas sensing

Abstract

Keywords

ASJC Scopus subject areas

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