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Intrinsic reoxidation of microwave plasma-nitrided gate dielectrics
H. N. Alshareef*, H. Niimi, A. Varghese, M. Bevan, R. Kuan, J. Holt, P. Tiner, R. Khamankar
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
3
Scopus
citations