Investigation of the nonlinear static and dynamic behaviour of rectangular microplates under electrostatic actuation

We present an investigation of the static and dynamic behavior of the nonlinear von-Karman plates when actuated by the nonlinear electrostatic forces. The investigation is based on a reduced order model developed using the Galerkin method, which rely on modeshapes and in-plane shape functions extracted using a finite element method. In this study, a fully clamped microplate is considered. We investigate the static behavior and the results are validated by comparison with the results calculated by a finite element model. The forced-vibration response of the plate is then investigated when the plate is excited by a harmonic AC load superimposed to a DC load. The dynamic behavior is examined near the primary resonance. The microplate shows a strong hardening behavior due to the cubic nonlinearity of mid-plane stretching. However, the behavior switches to softening as the DC load is increased.