Investigation on mc-Si bulk passivation using deuterated silicon-nitride

H. F.W. Dekkers*, S. De Wolf, G. Agostinelli, J. Szlufcik, T. Pernau, W. M. Arnoldbik, H. D. Goldbach, R. E.I. Schropp

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

16 Scopus citations

Fingerprint

Dive into the research topics of 'Investigation on mc-Si bulk passivation using deuterated silicon-nitride'. Together they form a unique fingerprint.

Engineering

Chemistry

Material Science

Chemical Engineering

Keyphrases