Abstract
Excimer laser irradiation of a single-crystalline silicon surface immersed under cyclohexane liquid is demonstrated to form diamond particulates. Scanning electron microscopy and Raman spectroscopy have been used to study the deposited particulates. A mechanism based on the condensation of energetic carbon atoms into diamond-like films is proposed to explain the process.
Original language | English (US) |
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Pages (from-to) | 543-547 |
Number of pages | 5 |
Journal | Applied Physics A: Materials Science and Processing |
Volume | 66 |
Issue number | 5 |
DOIs | |
State | Published - 1998 |
Externally published | Yes |
ASJC Scopus subject areas
- General Chemistry
- General Materials Science