Low damage reactive ion etching process for fabrication of ridge waveguide lasers

Keyphrases

• Annealing 100%
• Reactive Ion Etching 100%
• Ridge Waveguide Laser 100%
• Angstrom 100%
• Low Damage 100%
• Low Power 50%
• Epilayer 50%
• Etching Process 50%
• Plasma Power 50%
• Quantum Well Intermixing 50%
• Dry Etching 50%
• Wet Etching 50%
• Quantum Dot Lasers 50%
• Deep Well 50%
• Laser Beam Quality 50%

Material Science

• Waveguide 100%
• Reactive Ion Etching 100%
• Quantum Well 66%
• Annealing 33%
• Epilayers 33%
• Wet Etching 33%
• Point Defect 33%