TY - GEN
T1 - Low pull-in voltage electrostatic MEMS switch using liquid dielectric
AU - Zidan, Mohammed A.
AU - Kosel, Jürgen
AU - Salama, Khaled N.
N1 - KAUST Repository Item: Exported on 2020-10-01
PY - 2014/8
Y1 - 2014/8
N2 - In this paper, we present an electrostatic MEMS switch with liquids as dielectric to reduce the actuation voltage. The concept is verified by simulating a lateral dual gate switch, where the required pull-in voltage is reduced by more than 8 times after using water as a dielectric, to become as low as 5.36V. The proposed switch is simulated using COMSOL multiphysics using various liquid volumes to study their effect on the switching performance. Finally, we propose the usage of the lateral switch as a single switch XOR logic gate.
AB - In this paper, we present an electrostatic MEMS switch with liquids as dielectric to reduce the actuation voltage. The concept is verified by simulating a lateral dual gate switch, where the required pull-in voltage is reduced by more than 8 times after using water as a dielectric, to become as low as 5.36V. The proposed switch is simulated using COMSOL multiphysics using various liquid volumes to study their effect on the switching performance. Finally, we propose the usage of the lateral switch as a single switch XOR logic gate.
UR - http://hdl.handle.net/10754/564970
UR - http://ieeexplore.ieee.org/document/6908379/
UR - http://www.scopus.com/inward/record.url?scp=84908494917&partnerID=8YFLogxK
U2 - 10.1109/MWSCAS.2014.6908379
DO - 10.1109/MWSCAS.2014.6908379
M3 - Conference contribution
SN - 9781479941346; 9781479941346
SP - 169
EP - 172
BT - 2014 IEEE 57th International Midwest Symposium on Circuits and Systems (MWSCAS)
PB - Institute of Electrical and Electronics Engineers (IEEE)
ER -