Magnesium aluminium spinel thin film as a humidity sensor

G. Gusmano; G. Montesperelli; E. Traversa; A. Bearzotti; G. Petrocco; A. D'Amico; C. Di Natale

doi:10.1016/0925-4005(92)80344-W

Magnesium aluminium spinel thin film as a humidity sensor

G. Gusmano^*, G. Montesperelli, E. Traversa, A. Bearzotti, G. Petrocco, A. D'Amico, C. Di Natale

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

47 Scopus citations

Abstract

This paper discusses the use of Mg-Al spinel as a sensitive material suitable for application in humidity sensors. Mg-Al spinel thin films were deposited on a Si/SiO₂ substrate by the radiofrequency technique, using a target of sintered MgAl₂O₄ powder. SEM and XPS measurements were performed in order to investigate their microstructure and surface composition. Electrical measurements were carried out in a suitable test chamber, where temperature and humidity were controlled. The electrical behaviour of our samples in the relative humidity range from 2% up to 98% was explored. Significant changes in resistance and good reversibility obtained without the need for heat cleaning are the most interesting results.

Original language	English (US)
Pages (from-to)	460-463
Number of pages	4
Journal	Sensors and Actuators: B. Chemical
Volume	7
Issue number	1-3
DOIs	https://doi.org/10.1016/0925-4005(92)80344-W
State	Published - Mar 1992
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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10.1016/0925-4005(92)80344-W

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@article{fa6612ed21654d76a535580a8394f4bc,

title = "Magnesium aluminium spinel thin film as a humidity sensor",

abstract = "This paper discusses the use of Mg-Al spinel as a sensitive material suitable for application in humidity sensors. Mg-Al spinel thin films were deposited on a Si/SiO2 substrate by the radiofrequency technique, using a target of sintered MgAl2O4 powder. SEM and XPS measurements were performed in order to investigate their microstructure and surface composition. Electrical measurements were carried out in a suitable test chamber, where temperature and humidity were controlled. The electrical behaviour of our samples in the relative humidity range from 2% up to 98% was explored. Significant changes in resistance and good reversibility obtained without the need for heat cleaning are the most interesting results.",

author = "G. Gusmano and G. Montesperelli and E. Traversa and A. Bearzotti and G. Petrocco and A. D'Amico and Natale, {C. Di}",

year = "1992",

month = mar,

doi = "10.1016/0925-4005(92)80344-W",

language = "English (US)",

volume = "7",

pages = "460--463",

journal = "Sensors and Actuators: B. Chemical",

issn = "0925-4005",

publisher = "Elsevier",

number = "1-3",

}

TY - JOUR

T1 - Magnesium aluminium spinel thin film as a humidity sensor

AU - Gusmano, G.

AU - Montesperelli, G.

AU - Traversa, E.

AU - Bearzotti, A.

AU - Petrocco, G.

AU - D'Amico, A.

AU - Natale, C. Di

PY - 1992/3

Y1 - 1992/3

N2 - This paper discusses the use of Mg-Al spinel as a sensitive material suitable for application in humidity sensors. Mg-Al spinel thin films were deposited on a Si/SiO2 substrate by the radiofrequency technique, using a target of sintered MgAl2O4 powder. SEM and XPS measurements were performed in order to investigate their microstructure and surface composition. Electrical measurements were carried out in a suitable test chamber, where temperature and humidity were controlled. The electrical behaviour of our samples in the relative humidity range from 2% up to 98% was explored. Significant changes in resistance and good reversibility obtained without the need for heat cleaning are the most interesting results.

AB - This paper discusses the use of Mg-Al spinel as a sensitive material suitable for application in humidity sensors. Mg-Al spinel thin films were deposited on a Si/SiO2 substrate by the radiofrequency technique, using a target of sintered MgAl2O4 powder. SEM and XPS measurements were performed in order to investigate their microstructure and surface composition. Electrical measurements were carried out in a suitable test chamber, where temperature and humidity were controlled. The electrical behaviour of our samples in the relative humidity range from 2% up to 98% was explored. Significant changes in resistance and good reversibility obtained without the need for heat cleaning are the most interesting results.

UR - http://www.scopus.com/inward/record.url?scp=0026839997&partnerID=8YFLogxK

U2 - 10.1016/0925-4005(92)80344-W

DO - 10.1016/0925-4005(92)80344-W

M3 - Article

AN - SCOPUS:0026839997

SN - 0925-4005

VL - 7

SP - 460

EP - 463

JO - Sensors and Actuators: B. Chemical

JF - Sensors and Actuators: B. Chemical

IS - 1-3

ER -

Magnesium aluminium spinel thin film as a humidity sensor

Abstract

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