Measurements of corner cubes microstructures by high-magnification digital holographic microscopy

Jonas Kühn; Etienne Cuche; Yves Emery; Tristan Colomb; Florian Charrière; Frédéric Montfort; Mikhail Botkine; Nicolas Aspert; Christian Depeursinge

doi:10.1117/12.662030

Measurements of corner cubes microstructures by high-magnification digital holographic microscopy

Jonas Kühn^*, Etienne Cuche, Yves Emery, Tristan Colomb, Florian Charrière, Frédéric Montfort, Mikhail Botkine, Nicolas Aspert, Christian Depeursinge

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

11 Scopus citations

Abstract

This paper presents Digital Holographic Microscopy (DHM) quantitative measurements of transparent high aspect-ratio microstructures. Our experiment was performed using a digital holographic microscope in transmission configuration with a 60× magnification 1.3 NA oil immersion microscope objective, with a diode laser source at 664 nm. We used a calculation model based on the use of two immersion liquids for the experiment, the first one to resolve the phase jumps by using a refractive index liquid close to the sample index, in combination with a second one to retrieve the sample topology from the optical path length information. Such a model makes absolute topographic measurements of high aspect ratio transparent samples achievable by DHM. The model is then applied to measure 25 and 50 urn transparent micro-corner cubes arrays, which exhibit up to 1:1,4 aspect ratio with theoretical slopes up to about 55 degrees. Thanks to our phase measurement precision down to 1°, we found possible to measure accurately the slopes of each face of the microstructures under investigation, and this with a good theoretical agreement.

Original language	English (US)
Title of host publication	Optical Micro- and Nanometrology in Microsystems Technology
Volume	6188
DOIs	https://doi.org/10.1117/12.662030
State	Published - 2006
Externally published	Yes
Event	Optical Micro- and Nanometrology in Microsystems Technology - Strasbourg, France Duration: Apr 5 2006 → Apr 7 2006

Other

Other	Optical Micro- and Nanometrology in Microsystems Technology
Country/Territory	France
City	Strasbourg
Period	04/5/06 → 04/7/06

Keywords

Corner cube
Digital holography
High aspect-ratio
Metrology
Microscopy
Transparent microstructures

ASJC Scopus subject areas

Electrical and Electronic Engineering
Condensed Matter Physics

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Cite this

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title = "Measurements of corner cubes microstructures by high-magnification digital holographic microscopy",

abstract = "This paper presents Digital Holographic Microscopy (DHM) quantitative measurements of transparent high aspect-ratio microstructures. Our experiment was performed using a digital holographic microscope in transmission configuration with a 60× magnification 1.3 NA oil immersion microscope objective, with a diode laser source at 664 nm. We used a calculation model based on the use of two immersion liquids for the experiment, the first one to resolve the phase jumps by using a refractive index liquid close to the sample index, in combination with a second one to retrieve the sample topology from the optical path length information. Such a model makes absolute topographic measurements of high aspect ratio transparent samples achievable by DHM. The model is then applied to measure 25 and 50 urn transparent micro-corner cubes arrays, which exhibit up to 1:1,4 aspect ratio with theoretical slopes up to about 55 degrees. Thanks to our phase measurement precision down to 1°, we found possible to measure accurately the slopes of each face of the microstructures under investigation, and this with a good theoretical agreement.",

keywords = "Corner cube, Digital holography, High aspect-ratio, Metrology, Microscopy, Transparent microstructures",

author = "Jonas K{\"u}hn and Etienne Cuche and Yves Emery and Tristan Colomb and Florian Charri{\`e}re and Fr{\'e}d{\'e}ric Montfort and Mikhail Botkine and Nicolas Aspert and Christian Depeursinge",

year = "2006",

doi = "10.1117/12.662030",

language = "English (US)",

isbn = "0819462446",

volume = "6188",

booktitle = "Optical Micro- and Nanometrology in Microsystems Technology",

note = "Optical Micro- and Nanometrology in Microsystems Technology ; Conference date: 05-04-2006 Through 07-04-2006",

}

Kühn, J, Cuche, E, Emery, Y, Colomb, T, Charrière, F, Montfort, F, Botkine, M, Aspert, N & Depeursinge, C 2006, Measurements of corner cubes microstructures by high-magnification digital holographic microscopy. in Optical Micro- and Nanometrology in Microsystems Technology. vol. 6188, 618804, Optical Micro- and Nanometrology in Microsystems Technology, Strasbourg, France, 04/5/06. https://doi.org/10.1117/12.662030

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AU - Kühn, Jonas

AU - Cuche, Etienne

AU - Emery, Yves

AU - Colomb, Tristan

AU - Charrière, Florian

AU - Montfort, Frédéric

AU - Botkine, Mikhail

AU - Aspert, Nicolas

AU - Depeursinge, Christian

PY - 2006

Y1 - 2006

N2 - This paper presents Digital Holographic Microscopy (DHM) quantitative measurements of transparent high aspect-ratio microstructures. Our experiment was performed using a digital holographic microscope in transmission configuration with a 60× magnification 1.3 NA oil immersion microscope objective, with a diode laser source at 664 nm. We used a calculation model based on the use of two immersion liquids for the experiment, the first one to resolve the phase jumps by using a refractive index liquid close to the sample index, in combination with a second one to retrieve the sample topology from the optical path length information. Such a model makes absolute topographic measurements of high aspect ratio transparent samples achievable by DHM. The model is then applied to measure 25 and 50 urn transparent micro-corner cubes arrays, which exhibit up to 1:1,4 aspect ratio with theoretical slopes up to about 55 degrees. Thanks to our phase measurement precision down to 1°, we found possible to measure accurately the slopes of each face of the microstructures under investigation, and this with a good theoretical agreement.

AB - This paper presents Digital Holographic Microscopy (DHM) quantitative measurements of transparent high aspect-ratio microstructures. Our experiment was performed using a digital holographic microscope in transmission configuration with a 60× magnification 1.3 NA oil immersion microscope objective, with a diode laser source at 664 nm. We used a calculation model based on the use of two immersion liquids for the experiment, the first one to resolve the phase jumps by using a refractive index liquid close to the sample index, in combination with a second one to retrieve the sample topology from the optical path length information. Such a model makes absolute topographic measurements of high aspect ratio transparent samples achievable by DHM. The model is then applied to measure 25 and 50 urn transparent micro-corner cubes arrays, which exhibit up to 1:1,4 aspect ratio with theoretical slopes up to about 55 degrees. Thanks to our phase measurement precision down to 1°, we found possible to measure accurately the slopes of each face of the microstructures under investigation, and this with a good theoretical agreement.

KW - Corner cube

KW - Digital holography

KW - High aspect-ratio

KW - Metrology

KW - Microscopy

KW - Transparent microstructures

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DO - 10.1117/12.662030

M3 - Conference contribution

AN - SCOPUS:33746699654

SN - 0819462446

SN - 9780819462442

VL - 6188

BT - Optical Micro- and Nanometrology in Microsystems Technology

T2 - Optical Micro- and Nanometrology in Microsystems Technology

Y2 - 5 April 2006 through 7 April 2006

ER -

Measurements of corner cubes microstructures by high-magnification digital holographic microscopy

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