Mechanical and optical properties of hard SiCN coatings prepared by PECVD

P. Jedrzejowski; J. Cizek; A. Amassian; J. E. Klemberg-Sapieha; J. Vlcek; L. Martinu

doi:10.1016/S0040-6090(03)01057-5

Mechanical and optical properties of hard SiCN coatings prepared by PECVD

P. Jedrzejowski, J. Cizek, A. Amassian, J. E. Klemberg-Sapieha^*, J. Vlcek, L. Martinu

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

151 Scopus citations

Abstract

Novel amorphous SiCN coatings are becoming increasingly attractive because of their mechanical, optical and electronic properties. In the present work, SiCN films were fabricated by PECVD from SiH₄/CH₄/N ₂/Ar gas mixtures at a temperature of 400 °C. Mechanical properties such as hardness, Young's modulus, friction coefficient and stress were evaluated, respectively, by depth-sensing indentation, pin-on-disk, micro-scratch and curvature methods. Films deposited under optimized conditions exhibited a hardness > 30 GPa, Young's modulus > 190 GPa, elastic rebound of 85% and a compressive stress of approximately 1 GPa. A friction coefficient against Al₂O₃, ranging from 0.75 to 0.25 and a low surface roughness of approximately 1 nm were found to be accompanied by a refractive index ranging from 1.85 to 2.10 (at 550 nm) and an extinction coefficient between 1.0 × 10^-4 and 4.5 × 10 ^-2. The film behavior is correlated with the microstructure and composition determined by SEM, XPS, AFM and broad-range UV-VIS-NIR-IR spectroscopic ellipsometry.

Original language	English (US)
Pages (from-to)	201-207
Number of pages	7
Journal	Thin Solid Films
Volume	447-448
DOIs	https://doi.org/10.1016/S0040-6090(03)01057-5
State	Published - Jan 30 2004
Externally published	Yes
Event	Proceedings of the 30th International Conference on Metallurgie - San Diego, CA, United States Duration: Apr 28 2002 → May 2 2002

Keywords

Mechanical properties
Microstructure
PECVD
SiCN
Spectroscopic ellipsometry

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/S0040-6090(03)01057-5

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title = "Mechanical and optical properties of hard SiCN coatings prepared by PECVD",

abstract = "Novel amorphous SiCN coatings are becoming increasingly attractive because of their mechanical, optical and electronic properties. In the present work, SiCN films were fabricated by PECVD from SiH4/CH4/N 2/Ar gas mixtures at a temperature of 400 °C. Mechanical properties such as hardness, Young's modulus, friction coefficient and stress were evaluated, respectively, by depth-sensing indentation, pin-on-disk, micro-scratch and curvature methods. Films deposited under optimized conditions exhibited a hardness > 30 GPa, Young's modulus > 190 GPa, elastic rebound of 85% and a compressive stress of approximately 1 GPa. A friction coefficient against Al2O3, ranging from 0.75 to 0.25 and a low surface roughness of approximately 1 nm were found to be accompanied by a refractive index ranging from 1.85 to 2.10 (at 550 nm) and an extinction coefficient between 1.0 × 10-4 and 4.5 × 10 -2. The film behavior is correlated with the microstructure and composition determined by SEM, XPS, AFM and broad-range UV-VIS-NIR-IR spectroscopic ellipsometry.",

keywords = "Mechanical properties, Microstructure, PECVD, SiCN, Spectroscopic ellipsometry",

author = "P. Jedrzejowski and J. Cizek and A. Amassian and Klemberg-Sapieha, {J. E.} and J. Vlcek and L. Martinu",

year = "2004",

month = jan,

day = "30",

doi = "10.1016/S0040-6090(03)01057-5",

language = "English (US)",

volume = "447-448",

pages = "201--207",

journal = "Thin Solid Films",

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note = "Proceedings of the 30th International Conference on Metallurgie ; Conference date: 28-04-2002 Through 02-05-2002",

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TY - JOUR

T1 - Mechanical and optical properties of hard SiCN coatings prepared by PECVD

AU - Jedrzejowski, P.

AU - Cizek, J.

AU - Amassian, A.

AU - Klemberg-Sapieha, J. E.

AU - Vlcek, J.

AU - Martinu, L.

PY - 2004/1/30

Y1 - 2004/1/30

N2 - Novel amorphous SiCN coatings are becoming increasingly attractive because of their mechanical, optical and electronic properties. In the present work, SiCN films were fabricated by PECVD from SiH4/CH4/N 2/Ar gas mixtures at a temperature of 400 °C. Mechanical properties such as hardness, Young's modulus, friction coefficient and stress were evaluated, respectively, by depth-sensing indentation, pin-on-disk, micro-scratch and curvature methods. Films deposited under optimized conditions exhibited a hardness > 30 GPa, Young's modulus > 190 GPa, elastic rebound of 85% and a compressive stress of approximately 1 GPa. A friction coefficient against Al2O3, ranging from 0.75 to 0.25 and a low surface roughness of approximately 1 nm were found to be accompanied by a refractive index ranging from 1.85 to 2.10 (at 550 nm) and an extinction coefficient between 1.0 × 10-4 and 4.5 × 10 -2. The film behavior is correlated with the microstructure and composition determined by SEM, XPS, AFM and broad-range UV-VIS-NIR-IR spectroscopic ellipsometry.

AB - Novel amorphous SiCN coatings are becoming increasingly attractive because of their mechanical, optical and electronic properties. In the present work, SiCN films were fabricated by PECVD from SiH4/CH4/N 2/Ar gas mixtures at a temperature of 400 °C. Mechanical properties such as hardness, Young's modulus, friction coefficient and stress were evaluated, respectively, by depth-sensing indentation, pin-on-disk, micro-scratch and curvature methods. Films deposited under optimized conditions exhibited a hardness > 30 GPa, Young's modulus > 190 GPa, elastic rebound of 85% and a compressive stress of approximately 1 GPa. A friction coefficient against Al2O3, ranging from 0.75 to 0.25 and a low surface roughness of approximately 1 nm were found to be accompanied by a refractive index ranging from 1.85 to 2.10 (at 550 nm) and an extinction coefficient between 1.0 × 10-4 and 4.5 × 10 -2. The film behavior is correlated with the microstructure and composition determined by SEM, XPS, AFM and broad-range UV-VIS-NIR-IR spectroscopic ellipsometry.

KW - Mechanical properties

KW - Microstructure

KW - PECVD

KW - SiCN

KW - Spectroscopic ellipsometry

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U2 - 10.1016/S0040-6090(03)01057-5

DO - 10.1016/S0040-6090(03)01057-5

M3 - Conference article

AN - SCOPUS:1342281316

SN - 0040-6090

VL - 447-448

SP - 201

EP - 207

JO - Thin Solid Films

JF - Thin Solid Films

T2 - Proceedings of the 30th International Conference on Metallurgie

Y2 - 28 April 2002 through 2 May 2002

ER -

Mechanical and optical properties of hard SiCN coatings prepared by PECVD

Abstract

Keywords

ASJC Scopus subject areas

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