@inproceedings{cccaf4058c204ac6a26c8396fcdba76c,
title = "MEMS coupled resonator for filter application in AIR",
abstract = "We present a mechanically coupled MEMS H resonator capable of performing simultaneous amplification and filter operation in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multilayer surface micromachining process. A special fabrication process and device design is employed to enable the device's operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter. The device design combined with the mixed-frequency excitation is used to demonstrate simultaneous amplification and filtering in air.",
author = "Saad Ilyas and Nizar Jaber and Younis, {Mohammad I.}",
note = "Publisher Copyright: {\textcopyright} Copyright 2017 ASME.; ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017 ; Conference date: 06-08-2017 Through 09-08-2017",
year = "2017",
doi = "10.1115/DETC2017-67875",
language = "English (US)",
series = "Proceedings of the ASME Design Engineering Technical Conference",
publisher = "American Society of Mechanical Engineers (ASME)",
booktitle = "22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems",
}