MEMS digital parametric loudspeaker

Armando Arpys Arevalo Carreno, David Castro, David Conchouso Gonzalez, Jürgen Kosel, Ian G. Foulds

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations


This paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. © 2016 IEEE.
Original languageEnglish (US)
Title of host publication2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Number of pages4
ISBN (Print)9781509019731
StatePublished - Mar 23 2016


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