Cantilevers are one of the most utilized mechanical elements for acoustic sensing. In comparison to the edge clamped diaphragms of different shapes, a single edge clamped cantilever makes an acoustic sensor mechanically sensitive for detection of lower pressure. The aspect ratio of cantilevers is one of the most important parameters which affect sensitivity. Herein, we present a mathematical, finite element method and experimental analysis to determine the effect of the aspect ratio on the resonant frequency, response time, mechanical sensitivity, and capacitive sensitivity of a cantilever-based acoustic pressure sensor. Three cantilevers of different aspect ratios (0.67, 1, and 1.5) have been chosen for sound pressure application to detect capacitance change. The cantilever with the smallest aspect ratio (0.67) has the highest response time (206 ms), mechanical sensitivity, and capacitive sensitivity (22 fF), which reduce after increasing the aspect ratio. The resonant frequency of the cantilever was also analyzed by applying sweep in sound frequency. It was found to be minimum for the cantilever with the smallest aspect ratio (510 Hz) and increases with an increase in the aspect ratio. We have applied the garage fabrication process using low cost, recyclable, and easily available materials such as metal coated polymer sheets, mounting tapes and glass slides as alternative materials for expensive materials.
|Original language||English (US)|
|State||Published - May 12 2020|