Metalorganic Vapor Phase Epitaxial Growth of Nonpolar Al(Ga,In)N Films on Lattice-Mismatched Substrates

Hiroshi Amano, Takeshi Kawashima, Daisuke Iida, Masataka Imura, Motoaki Iwaya, Satoshi Kamiyama, Isamu Akasaki

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish (US)
Title of host publicationNitrides with Nonpolar Surfaces: Growth, Properties, and Devices
PublisherWiley-VCH Verlag GmbH & Co. KGaA
Pages101-118
Number of pages18
ISBN (Print)9783527407682
DOIs
StatePublished - Sep 16 2008
Externally publishedYes

Cite this