@article{69a5f025e2984c328e7be4d0fc673026,
title = "Microfabrication of phase shifting zone plates for hard x-rays",
author = "V. White and S. Bajikar and D. Denton and F. Cerrina and B. Lai and Yun, {W. B.} and D. Legnini and Y. Xiao and J. Chrzas and E. DiFabrizio and L. Grella and M. Baciocchi",
note = "Funding Information: This work was supported by a contract from Argonne National Laboratory, U.S. Department of Energy, W-31-109-ENG-38.",
year = "1993",
month = apr,
doi = "10.1016/0167-9317(93)90036-5",
language = "English (US)",
volume = "21",
pages = "99--102",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "ELSEVIER SCIENCE BV",
number = "1-4",
}