Microlithographic techniques for laser assisted fabrication of bioelectronic devices

E. Di Fabrizio*, M. Gentili, P. Morales, R. Pilloton, J. Mela, S. Santucci, A. Sese

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Scopus citations


Microlithographic techniques are described for the fabrication of removable stencils to be used in micropatterning by laser deposition of organic and biological matter. Patterned layers are shown together with same atomic force microscope preliminary characterization. Also, a lithographically fabricated micron size glucose biosenser is shown, together with first assays of its performance.

Original languageEnglish (US)
Pages (from-to)3280-3282
Number of pages3
JournalApplied Physics Letters
Issue number21
StatePublished - Nov 18 1996
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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