Microlithographic techniques for laser assisted fabrication of bioelectronic devices

E. Di Fabrizio; M. Gentili; P. Morales; R. Pilloton; J. Mela; S. Santucci; A. Sese

doi:10.1063/1.117310

Microlithographic techniques for laser assisted fabrication of bioelectronic devices

E. Di Fabrizio^*, M. Gentili, P. Morales, R. Pilloton, J. Mela, S. Santucci, A. Sese

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

Microlithographic techniques are described for the fabrication of removable stencils to be used in micropatterning by laser deposition of organic and biological matter. Patterned layers are shown together with same atomic force microscope preliminary characterization. Also, a lithographically fabricated micron size glucose biosenser is shown, together with first assays of its performance.

Original language	English (US)
Pages (from-to)	3280-3282
Number of pages	3
Journal	Applied Physics Letters
Volume	69
Issue number	21
DOIs	https://doi.org/10.1063/1.117310
State	Published - Nov 18 1996
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.117310

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@article{4bd18d3034b44753aa49d147620fa707,

title = "Microlithographic techniques for laser assisted fabrication of bioelectronic devices",

abstract = "Microlithographic techniques are described for the fabrication of removable stencils to be used in micropatterning by laser deposition of organic and biological matter. Patterned layers are shown together with same atomic force microscope preliminary characterization. Also, a lithographically fabricated micron size glucose biosenser is shown, together with first assays of its performance.",

author = "{Di Fabrizio}, E. and M. Gentili and P. Morales and R. Pilloton and J. Mela and S. Santucci and A. Sese",

year = "1996",

month = nov,

day = "18",

doi = "10.1063/1.117310",

language = "English (US)",

volume = "69",

pages = "3280--3282",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "AMER INST PHYSICS",

number = "21",

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TY - JOUR

T1 - Microlithographic techniques for laser assisted fabrication of bioelectronic devices

AU - Di Fabrizio, E.

AU - Gentili, M.

AU - Morales, P.

AU - Pilloton, R.

AU - Mela, J.

AU - Santucci, S.

AU - Sese, A.

PY - 1996/11/18

Y1 - 1996/11/18

N2 - Microlithographic techniques are described for the fabrication of removable stencils to be used in micropatterning by laser deposition of organic and biological matter. Patterned layers are shown together with same atomic force microscope preliminary characterization. Also, a lithographically fabricated micron size glucose biosenser is shown, together with first assays of its performance.

AB - Microlithographic techniques are described for the fabrication of removable stencils to be used in micropatterning by laser deposition of organic and biological matter. Patterned layers are shown together with same atomic force microscope preliminary characterization. Also, a lithographically fabricated micron size glucose biosenser is shown, together with first assays of its performance.

UR - http://www.scopus.com/inward/record.url?scp=0000800276&partnerID=8YFLogxK

U2 - 10.1063/1.117310

DO - 10.1063/1.117310

M3 - Article

AN - SCOPUS:0000800276

SN - 0003-6951

VL - 69

SP - 3280

EP - 3282

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 21

ER -

Microlithographic techniques for laser assisted fabrication of bioelectronic devices

Abstract

ASJC Scopus subject areas

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