Micromachined porous polymer for bubble free electro-osmotic pump

Senol Mutlu; Cong Yu; P. Selvaganapathy; Frantisek Svec; Carlos H. Mastrangelo; Jean M.J. Frechet

doi:10.1109/MEMSYS.2002.984050

Micromachined porous polymer for bubble free electro-osmotic pump

Senol Mutlu, Cong Yu, P. Selvaganapathy, Frantisek Svec, Carlos H. Mastrangelo, Jean M.J. Frechet

Research output: Contribution to journal › Article › peer-review

27 Scopus citations

Abstract

A novel porous polymer was microfabricated to serve as a porous plug for a new device, the porous plug electro-osmotic pump (pp-EOP). The plug eliminates any back pressure effects while enhances electro-osmotic flow in a channel. The pp-EOP was batch fabricated by surface micromachining on top of a silicon wafer. The pp-EOP device is driven by a periodic, zero-average injected current signal at low frequencies producing bubble-free electro-osmotic flow with reversible net movement. Testing of the device produced an average water-air interface velocity of 1.8 μm/s at 0.8 Hz. The velocity was increased to 4.8 and to 13.9 μm/s by necking the channel size.

Original language	English (US)
Pages (from-to)	19-23
Number of pages	5
Journal	Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2002.984050
State	Published - 2002
Externally published	Yes

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering
Control and Systems Engineering

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10.1109/MEMSYS.2002.984050

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abstract = "A novel porous polymer was microfabricated to serve as a porous plug for a new device, the porous plug electro-osmotic pump (pp-EOP). The plug eliminates any back pressure effects while enhances electro-osmotic flow in a channel. The pp-EOP was batch fabricated by surface micromachining on top of a silicon wafer. The pp-EOP device is driven by a periodic, zero-average injected current signal at low frequencies producing bubble-free electro-osmotic flow with reversible net movement. Testing of the device produced an average water-air interface velocity of 1.8 μm/s at 0.8 Hz. The velocity was increased to 4.8 and to 13.9 μm/s by necking the channel size.",

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AU - Mutlu, Senol

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AU - Mastrangelo, Carlos H.

AU - Frechet, Jean M.J.

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AB - A novel porous polymer was microfabricated to serve as a porous plug for a new device, the porous plug electro-osmotic pump (pp-EOP). The plug eliminates any back pressure effects while enhances electro-osmotic flow in a channel. The pp-EOP was batch fabricated by surface micromachining on top of a silicon wafer. The pp-EOP device is driven by a periodic, zero-average injected current signal at low frequencies producing bubble-free electro-osmotic flow with reversible net movement. Testing of the device produced an average water-air interface velocity of 1.8 μm/s at 0.8 Hz. The velocity was increased to 4.8 and to 13.9 μm/s by necking the channel size.

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Micromachined porous polymer for bubble free electro-osmotic pump

Abstract

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