TY - JOUR
T1 - Micromachined Threshold Inertial Switches: A Review
AU - Xu, Qiu
AU - Younis, Mohammad I.
N1 - KAUST Repository Item: Exported on 2022-04-04
Acknowledgements: This publication is based upon work supported by King Abdullah University of Science and Technology (KAUST).
PY - 2022/3/28
Y1 - 2022/3/28
N2 - This paper presents a review of the recent advances on micromachined inertial switches/triggers. The review focuses on their advantages and disadvantages, sensitive directions, mechanisms of contact-enhancement, threshold accuracy, and the tunability of the acceleration threshold. Several applications of these sensors are highlighted including in healthcare, structural health monitoring, internet of things (IoT), and military. Recent contemporary research directions are also discussed, such as multi-directions/axis, multi-threshold sensors, and machine learning implementation. The article concludes with discussion on future development trends and performance improvements of inertial switches.
AB - This paper presents a review of the recent advances on micromachined inertial switches/triggers. The review focuses on their advantages and disadvantages, sensitive directions, mechanisms of contact-enhancement, threshold accuracy, and the tunability of the acceleration threshold. Several applications of these sensors are highlighted including in healthcare, structural health monitoring, internet of things (IoT), and military. Recent contemporary research directions are also discussed, such as multi-directions/axis, multi-threshold sensors, and machine learning implementation. The article concludes with discussion on future development trends and performance improvements of inertial switches.
UR - http://hdl.handle.net/10754/676060
UR - https://iopscience.iop.org/article/10.1088/1361-6439/ac6192
U2 - 10.1088/1361-6439/ac6192
DO - 10.1088/1361-6439/ac6192
M3 - Article
SN - 0960-1317
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
ER -