Abstract
Electroencephalography (EEG) recordings can be used to help paralyzed patients by replacing functionality of damaged neural connections through the aid of a brain-computer interface. Conventional electrodes used for EEG require long skin preparation due to the impedance of the outermost layers of skin. On the contrary, dry spiked electrodes allow overcoming of impedance problems and can be suitable for long-term measurements. This paper describes microfabrication and packaging of micropatterned dry electrodes built with deep X-ray lithography, electroplating and soft lithography. Preliminary measurements performed with electrodes having different geometries are also described.
Original language | English (US) |
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Pages (from-to) | 1737-1740 |
Number of pages | 4 |
Journal | Microelectronic Engineering |
Volume | 84 |
Issue number | 5-8 |
DOIs | |
State | Published - May 2007 |
Externally published | Yes |
Keywords
- Biopotential electrodes
- Brain-computer interface
- Deep X-ray lithography
- LIGA
- Soft lithography
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering