Abstract
The results of investigations into interfaces and thin films in heterostructures with the use of spherical-aberration-corrected transmission and scanning transmission electron microscopy (STEM) by applying supersensitive energy-dispersion X-ray microanalysis are presented. Using examples of heterostructures of various materials (Si/Ge, InGaAs/InAs, AlN/GaN, YBCO on various substrates and LuFe(Co)O3/YSZ), the possibility of determining the morphology and atomic structure of interfaces and mechanisms of the formation of layers is shown.
Original language | English (US) |
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Pages (from-to) | 317-327 |
Number of pages | 11 |
Journal | Nanotechnologies in Russia |
Volume | 8 |
Issue number | 5-6 |
DOIs | |
State | Published - May 2013 |
Externally published | Yes |
ASJC Scopus subject areas
- General Materials Science
- Condensed Matter Physics
- General Engineering