Modeling and Simulation of A MEMS Resonator Based Reprogrammable Logic Gate Using Partial Electrodes

Sally Ahmed; Ren Li; Xuecui Zou; Md Abdullah Al Hafiz; Hossein Fariborzi

doi:10.1109/DTIP.2019.8752880

Modeling and Simulation of A MEMS Resonator Based Reprogrammable Logic Gate Using Partial Electrodes

Sally Ahmed, Ren Li, Xuecui Zou, Md Abdullah Al Hafiz, Hossein Fariborzi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Scopus citations

Abstract

In this work, we present a reprogrammable micro-resonator logic gate designed with an industrial standard process. The device operation is based on altering the resonance frequency of the beam using DC digital inputs. The proposed design methodology reduces design complexity by 4 to 10 times compared to traditional CMOS design techniques and has great potential for improving energy efficiency. The proposed device has been simulated by MEMS+ software provided by Coventor using XMB10_M30 process design kit (PDK) and then exported into Cadence for further simulations and layout creation following XMB10 process provided by X-FAB.

Original language	English (US)
Title of host publication	2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
ISBN (Print)	9781728132884
DOIs	https://doi.org/10.1109/DTIP.2019.8752880
State	Published - Jul 4 2019

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10.1109/DTIP.2019.8752880

https://repository.kaust.edu.sa/bitstream/10754/632553/1/DTIP19-72_high_reso_pic.pdf

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@inproceedings{340c01a2e71b45a19255c2ddeea60ee5,

title = "Modeling and Simulation of A MEMS Resonator Based Reprogrammable Logic Gate Using Partial Electrodes",

abstract = "In this work, we present a reprogrammable micro-resonator logic gate designed with an industrial standard process. The device operation is based on altering the resonance frequency of the beam using DC digital inputs. The proposed design methodology reduces design complexity by 4 to 10 times compared to traditional CMOS design techniques and has great potential for improving energy efficiency. The proposed device has been simulated by MEMS+ software provided by Coventor using XMB10_M30 process design kit (PDK) and then exported into Cadence for further simulations and layout creation following XMB10 process provided by X-FAB.",

author = "Sally Ahmed and Ren Li and Xuecui Zou and {Al Hafiz}, {Md Abdullah} and Hossein Fariborzi",

note = "KAUST Repository Item: Exported on 2020-10-01 Acknowledged KAUST grant number(s): OSR-2016-CRG5-3001 Acknowledgements: This work is supported by King Abdullah University of Science and Technology (KAUST) office of sponsored research (OSR) under Award No. OSR-2016-CRG5-3001.",

year = "2019",

month = jul,

day = "4",

doi = "10.1109/DTIP.2019.8752880",

language = "English (US)",

isbn = "9781728132884",

booktitle = "2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

}

Modeling and Simulation of A MEMS Resonator Based Reprogrammable Logic Gate Using Partial Electrodes. / Ahmed, Sally; Li, Ren; Zou, Xuecui et al.
2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP). Institute of Electrical and Electronics Engineers (IEEE), 2019.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Modeling and Simulation of A MEMS Resonator Based Reprogrammable Logic Gate Using Partial Electrodes

AU - Ahmed, Sally

AU - Li, Ren

AU - Zou, Xuecui

AU - Al Hafiz, Md Abdullah

AU - Fariborzi, Hossein

N1 - KAUST Repository Item: Exported on 2020-10-01 Acknowledged KAUST grant number(s): OSR-2016-CRG5-3001 Acknowledgements: This work is supported by King Abdullah University of Science and Technology (KAUST) office of sponsored research (OSR) under Award No. OSR-2016-CRG5-3001.

PY - 2019/7/4

Y1 - 2019/7/4

N2 - In this work, we present a reprogrammable micro-resonator logic gate designed with an industrial standard process. The device operation is based on altering the resonance frequency of the beam using DC digital inputs. The proposed design methodology reduces design complexity by 4 to 10 times compared to traditional CMOS design techniques and has great potential for improving energy efficiency. The proposed device has been simulated by MEMS+ software provided by Coventor using XMB10_M30 process design kit (PDK) and then exported into Cadence for further simulations and layout creation following XMB10 process provided by X-FAB.

AB - In this work, we present a reprogrammable micro-resonator logic gate designed with an industrial standard process. The device operation is based on altering the resonance frequency of the beam using DC digital inputs. The proposed design methodology reduces design complexity by 4 to 10 times compared to traditional CMOS design techniques and has great potential for improving energy efficiency. The proposed device has been simulated by MEMS+ software provided by Coventor using XMB10_M30 process design kit (PDK) and then exported into Cadence for further simulations and layout creation following XMB10 process provided by X-FAB.

UR - http://hdl.handle.net/10754/632553

UR - https://ieeexplore.ieee.org/document/8752880/

UR - http://www.scopus.com/inward/record.url?scp=85069505842&partnerID=8YFLogxK

U2 - 10.1109/DTIP.2019.8752880

DO - 10.1109/DTIP.2019.8752880

M3 - Conference contribution

SN - 9781728132884

BT - 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)

PB - Institute of Electrical and Electronics Engineers (IEEE)

ER -

Modeling and Simulation of A MEMS Resonator Based Reprogrammable Logic Gate Using Partial Electrodes

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