TY - GEN
T1 - Modeling squeeze-film damping of electrostatically actuated microplates undergoing large deflections
AU - Younis, Mohammad I.
AU - Nayfeh, Ali H.
PY - 2005
Y1 - 2005
N2 - A model for the dynamics of electrostatically actuated microplates undergoing large deflections under the effect of squeeze-film damping is presented. The model predicts the quality factors of microplates under a wide range of gas pressures and applied electrostatic forces up to the pull-in instability. The model utilizes the nonlinear Euler-Bernoulli beam equation, the von Kármán plate equations, and the compressible Reynolds equation. The static deflection of the microplate is calculated using the beam model. Analytical expressions are derived for the pressure distribution in terms of the plate mode shapes around the deflected position using perturbation techniques. The static deflection and the analytical expressions are substituted into the plate equations, which are solved using a finite-element method. Several results are presented showing the effect of the pressure and the electrostatic force on the structural mode shapes, the pressure distributions, the natural frequencies, and the quality factors.
AB - A model for the dynamics of electrostatically actuated microplates undergoing large deflections under the effect of squeeze-film damping is presented. The model predicts the quality factors of microplates under a wide range of gas pressures and applied electrostatic forces up to the pull-in instability. The model utilizes the nonlinear Euler-Bernoulli beam equation, the von Kármán plate equations, and the compressible Reynolds equation. The static deflection of the microplate is calculated using the beam model. Analytical expressions are derived for the pressure distribution in terms of the plate mode shapes around the deflected position using perturbation techniques. The static deflection and the analytical expressions are substituted into the plate equations, which are solved using a finite-element method. Several results are presented showing the effect of the pressure and the electrostatic force on the structural mode shapes, the pressure distributions, the natural frequencies, and the quality factors.
UR - http://www.scopus.com/inward/record.url?scp=33244469710&partnerID=8YFLogxK
U2 - 10.1115/detc2005-84421
DO - 10.1115/detc2005-84421
M3 - Conference contribution
AN - SCOPUS:33244469710
SN - 0791847438
SN - 9780791847435
T3 - Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - DETC2005
SP - 1969
EP - 1978
BT - Proc. of the ASME Int. Des. Eng. Tech. Conf. and Comput. and Information in Engineering Conferences - DETC2005
PB - American Society of Mechanical Engineers
T2 - DETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
Y2 - 24 September 2005 through 28 September 2005
ER -