Multi-Threshold MEMS Shock Sensor for Quantitative Acceleration Measerements

Qiu Xu; Lvjun Wang; Alhammam Niyazi; Mohammad I. Younis

doi:10.1109/transducers50396.2021.9495396

Multi-Threshold MEMS Shock Sensor for Quantitative Acceleration Measerements

Qiu Xu, Lvjun Wang, Alhammam Niyazi, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Scopus citations

Abstract

This paper presents a multi-threshold inertial switch demonstrated through experimental results. A laterally-driven multi-threshold inertial switch based on SOIMUMPs has been fabricated. The device has been tested by a drop-table test system under different shock accelerations with various amplitudes and pulse widths. The designed switch is a 2-axis device capable of triggering in all directions in a single plane. This work demonstrates that such a designed inertial switch with 3 threshold levels can perform quantitative acceleration measurements while saving power when not activated. The multi-threshold inertial switch can sense a shock range of 800g-2600g. The same device principle can be extended for higher number of bits.

Original language	English (US)
Title of host publication	2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Publisher	IEEE
ISBN (Print)	9781665412674
DOIs	https://doi.org/10.1109/transducers50396.2021.9495396
State	Published - Jun 20 2021

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10.1109/transducers50396.2021.9495396

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@inproceedings{719f52ea69ec4e5c8758f210c11781ab,

title = "Multi-Threshold MEMS Shock Sensor for Quantitative Acceleration Measerements",

abstract = "This paper presents a multi-threshold inertial switch demonstrated through experimental results. A laterally-driven multi-threshold inertial switch based on SOIMUMPs has been fabricated. The device has been tested by a drop-table test system under different shock accelerations with various amplitudes and pulse widths. The designed switch is a 2-axis device capable of triggering in all directions in a single plane. This work demonstrates that such a designed inertial switch with 3 threshold levels can perform quantitative acceleration measurements while saving power when not activated. The multi-threshold inertial switch can sense a shock range of 800g-2600g. The same device principle can be extended for higher number of bits.",

author = "Qiu Xu and Lvjun Wang and Alhammam Niyazi and Younis, {Mohammad I.}",

note = "KAUST Repository Item: Exported on 2021-08-10 Acknowledgements: This publication is based upon work supported by King Abdullah University of Science and Technology (KAUST)",

year = "2021",

month = jun,

day = "20",

doi = "10.1109/transducers50396.2021.9495396",

language = "English (US)",

isbn = "9781665412674",

booktitle = "2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)",

publisher = "IEEE",

}

TY - GEN

T1 - Multi-Threshold MEMS Shock Sensor for Quantitative Acceleration Measerements

AU - Xu, Qiu

AU - Wang, Lvjun

AU - Niyazi, Alhammam

AU - Younis, Mohammad I.

N1 - KAUST Repository Item: Exported on 2021-08-10 Acknowledgements: This publication is based upon work supported by King Abdullah University of Science and Technology (KAUST)

PY - 2021/6/20

Y1 - 2021/6/20

N2 - This paper presents a multi-threshold inertial switch demonstrated through experimental results. A laterally-driven multi-threshold inertial switch based on SOIMUMPs has been fabricated. The device has been tested by a drop-table test system under different shock accelerations with various amplitudes and pulse widths. The designed switch is a 2-axis device capable of triggering in all directions in a single plane. This work demonstrates that such a designed inertial switch with 3 threshold levels can perform quantitative acceleration measurements while saving power when not activated. The multi-threshold inertial switch can sense a shock range of 800g-2600g. The same device principle can be extended for higher number of bits.

AB - This paper presents a multi-threshold inertial switch demonstrated through experimental results. A laterally-driven multi-threshold inertial switch based on SOIMUMPs has been fabricated. The device has been tested by a drop-table test system under different shock accelerations with various amplitudes and pulse widths. The designed switch is a 2-axis device capable of triggering in all directions in a single plane. This work demonstrates that such a designed inertial switch with 3 threshold levels can perform quantitative acceleration measurements while saving power when not activated. The multi-threshold inertial switch can sense a shock range of 800g-2600g. The same device principle can be extended for higher number of bits.

UR - http://hdl.handle.net/10754/670514

UR - https://ieeexplore.ieee.org/document/9495396/

U2 - 10.1109/transducers50396.2021.9495396

DO - 10.1109/transducers50396.2021.9495396

M3 - Conference contribution

SN - 9781665412674

BT - 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

PB - IEEE

ER -

Multi-Threshold MEMS Shock Sensor for Quantitative Acceleration Measerements

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