Multilayer and inhomogeneous optical filters fabricated by PECVD using titanium dioxide and silicon dioxide

S. Larouche*, A. Amassian, S. C. Gujrathi, J. E. Klemberg-Sapieha, L. Martinu

*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

13 Scopus citations

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Material Science