Keyphrases
Multi-mode
100%
MEMS Resonator
100%
Vapor Temperature
100%
Vapor Concentration
100%
Environmental Temperature
100%
Simultaneous Sensing
100%
Gas Sensor
66%
Temperature Concentration
66%
Microbeam
66%
Gas Concentration
66%
Environmental Gases
66%
Metal-organic Frameworks (MOFs)
33%
Water Vapor
33%
Measurement Reliability
33%
Atmospheric Pressure
33%
Squeeze Film Damping
33%
Sensor-based
33%
Close Proximity
33%
Clamped-clamped Microbeam
33%
Microbeam Resonator
33%
Frequency Shift
33%
Signal Processing
33%
Vibration Mode
33%
Harmonic Voltage
33%
Current Solution
33%
Measurement Accuracy
33%
Two-mode
33%
Fabrication Cost
33%
Device Sizing
33%
Cross-sensitivity
33%
Power Required
33%
Water Vapor Concentration
33%
Reference Sensor
33%
Thermometer
33%
Physical Stimuli
33%
Resonant Gas Sensor
33%
Allan Deviation
33%
Sensor Drift
33%
Engineering
Multimode
100%
Gas Sensor
100%
Environmental Temperature
100%
Resonator
100%
Demonstrates
66%
Close Proximity
33%
Harmonic Voltage
33%
Vibration Mode
33%
Physical Stimulus
33%
Electrostatics
33%
Frequency Shift
33%
Atmospheric Pressure
33%
Material Science
Gas Sensor
100%
Resonator
100%
Water Vapor
66%
Electronic Circuit
33%
Metal-Organic Framework
33%
Film
33%