Nanoelectromechanical resonator for logic operations

Syed Kazmi, Md Abdullah Al Hafiz, Karumbaiah Chappanda Nanaiah, Saad Ilyas, Jorge Alberto Holguin Lerma, Pedro M. F. J. Da Costa, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations


We report an electro-thermally tunable in-plane doubly-clamped nanoelectromechanical resonator capable of dynamically performing NOR, NOT, XNOR, XOR, and AND logic operations. Toward this, a silicon based resonator is fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer of a silicon-on-insulator (SOI) wafer. The performance of this logic device is examined at elevated temperatures, ranging from 25 °C to 85 °C, demonstrating its resilience for most of the logic operations; thereby paving the way towards nano-elements-based mechanical computing.
Original languageEnglish (US)
Title of host publication2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Number of pages5
ISBN (Print)9781509030590
StatePublished - Aug 29 2017


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