Nanoelectromechanical resonator for logic operations

Syed Kazmi; Md Abdullah Al Hafiz; Karumbaiah Chappanda Nanaiah; Saad Ilyas; Jorge Alberto Holguin Lerma; Pedro M. F. J. Da Costa; Mohammad I. Younis

doi:10.1109/nems.2017.8016963

Nanoelectromechanical resonator for logic operations

Syed Kazmi, Md Abdullah Al Hafiz, Karumbaiah Chappanda Nanaiah, Saad Ilyas, Jorge Alberto Holguin Lerma, Pedro M. F. J. Da Costa, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Scopus citations

Abstract

We report an electro-thermally tunable in-plane doubly-clamped nanoelectromechanical resonator capable of dynamically performing NOR, NOT, XNOR, XOR, and AND logic operations. Toward this, a silicon based resonator is fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer of a silicon-on-insulator (SOI) wafer. The performance of this logic device is examined at elevated temperatures, ranging from 25 °C to 85 °C, demonstrating its resilience for most of the logic operations; thereby paving the way towards nano-elements-based mechanical computing.

Original language	English (US)
Title of host publication	2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	11-15
Number of pages	5
ISBN (Print)	9781509030590
DOIs	https://doi.org/10.1109/nems.2017.8016963
State	Published - Aug 29 2017

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10.1109/nems.2017.8016963

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Kazmi, S., Hafiz, M. A. A., Nanaiah, K. C., Ilyas, S., Holguin Lerma, J. A., Da Costa, P. M. F. J., & Younis, M. I. (2017). Nanoelectromechanical resonator for logic operations. In 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) (pp. 11-15). Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/nems.2017.8016963

@inproceedings{776bb5afbaa2463caf901d08d94477b9,

title = "Nanoelectromechanical resonator for logic operations",

abstract = "We report an electro-thermally tunable in-plane doubly-clamped nanoelectromechanical resonator capable of dynamically performing NOR, NOT, XNOR, XOR, and AND logic operations. Toward this, a silicon based resonator is fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer of a silicon-on-insulator (SOI) wafer. The performance of this logic device is examined at elevated temperatures, ranging from 25 °C to 85 °C, demonstrating its resilience for most of the logic operations; thereby paving the way towards nano-elements-based mechanical computing.",

author = "Syed Kazmi and Hafiz, {Md Abdullah Al} and Nanaiah, {Karumbaiah Chappanda} and Saad Ilyas and {Holguin Lerma}, {Jorge Alberto} and {Da Costa}, {Pedro M. F. J.} and Younis, {Mohammad I.}",

note = "KAUST Repository Item: Exported on 2020-10-01 Acknowledgements: The authors would like to thank the staff of Advanced Nanofabrication Imaging and Characterization lab for their help during the fabrication of the devices. We gratefully acknowledge KAUST for funding this project.",

year = "2017",

month = aug,

day = "29",

doi = "10.1109/nems.2017.8016963",

language = "English (US)",

isbn = "9781509030590",

pages = "11--15",

booktitle = "2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

}

Nanoelectromechanical resonator for logic operations. / Kazmi, Syed; Hafiz, Md Abdullah Al; Nanaiah, Karumbaiah Chappanda et al.
2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). Institute of Electrical and Electronics Engineers (IEEE), 2017. p. 11-15.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Nanoelectromechanical resonator for logic operations

AU - Kazmi, Syed

AU - Hafiz, Md Abdullah Al

AU - Nanaiah, Karumbaiah Chappanda

AU - Ilyas, Saad

AU - Holguin Lerma, Jorge Alberto

AU - Da Costa, Pedro M. F. J.

AU - Younis, Mohammad I.

N1 - KAUST Repository Item: Exported on 2020-10-01 Acknowledgements: The authors would like to thank the staff of Advanced Nanofabrication Imaging and Characterization lab for their help during the fabrication of the devices. We gratefully acknowledge KAUST for funding this project.

PY - 2017/8/29

Y1 - 2017/8/29

N2 - We report an electro-thermally tunable in-plane doubly-clamped nanoelectromechanical resonator capable of dynamically performing NOR, NOT, XNOR, XOR, and AND logic operations. Toward this, a silicon based resonator is fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer of a silicon-on-insulator (SOI) wafer. The performance of this logic device is examined at elevated temperatures, ranging from 25 °C to 85 °C, demonstrating its resilience for most of the logic operations; thereby paving the way towards nano-elements-based mechanical computing.

AB - We report an electro-thermally tunable in-plane doubly-clamped nanoelectromechanical resonator capable of dynamically performing NOR, NOT, XNOR, XOR, and AND logic operations. Toward this, a silicon based resonator is fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer of a silicon-on-insulator (SOI) wafer. The performance of this logic device is examined at elevated temperatures, ranging from 25 °C to 85 °C, demonstrating its resilience for most of the logic operations; thereby paving the way towards nano-elements-based mechanical computing.

UR - http://hdl.handle.net/10754/626004

UR - http://ieeexplore.ieee.org/document/8016963/

UR - http://www.scopus.com/inward/record.url?scp=85030831929&partnerID=8YFLogxK

U2 - 10.1109/nems.2017.8016963

DO - 10.1109/nems.2017.8016963

M3 - Conference contribution

AN - SCOPUS:85030831929

SN - 9781509030590

SP - 11

EP - 15

BT - 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

PB - Institute of Electrical and Electronics Engineers (IEEE)

ER -

Nanoelectromechanical resonator for logic operations

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