@inproceedings{776bb5afbaa2463caf901d08d94477b9,
title = "Nanoelectromechanical resonator for logic operations",
abstract = "We report an electro-Thermally tunable in-plane doubly-clamped nanoelectromechanical resonator capable of dynamically performing NOR, NOT, XNOR, XOR, and AND logic operations. Toward this, a silicon based resonator is fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer of a silicon-on-insulator (SOI) wafer. The performance of this logic device is examined at elevated temperatures, ranging from 25 °C to 85 °C, demonstrating its resilience for most of the logic operations; thereby paving the way towards nano-elements-based mechanical computing.",
keywords = "Doubly-clamped nanomechanical beam, Electro-Thermal frequency modulation, Logic computation, Logic operations, Nanoelectromechanical resonator, Nanomechanical logic, Resonance frequency",
author = "Kazmi, {Syed N.R.} and Hafiz, {Md A.Al} and Chappanda, {Karumbaiah N.} and Saad Ilyas and Jorge Holguin and Costa, {Pedro M.F.J.} and Younis, {Mohammad I.}",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 ; Conference date: 09-04-2017 Through 12-04-2017",
year = "2017",
month = aug,
day = "25",
doi = "10.1109/NEMS.2017.8016963",
language = "English (US)",
series = "2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "11--15",
booktitle = "2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017",
address = "United States",
}