Nanoimprint lithography for high-efficiency thin-film silicon solar cells

Corsin Battaglia*, Jordi Escarré, Karin Söderström, Lukas Erni, Laura Ding, Grégory Bugnon, Adrian Billet, Mathieu Boccard, Loris Barraud, Stefaan De Wolf, Franz Josef Haug, Matthieu Despeisse, Christophe Ballif

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

168 Scopus citations


We demonstrate high-efficiency thin-film silicon solar cells with transparent nanotextured front electrodes fabricated via ultraviolet nanoimprint lithography on glass substrates. By replicating the morphology of state-of-the-art nanotextured zinc oxide front electrodes known for their exceptional light trapping properties, conversion efficiencies of up to 12.0% are achieved for micromorph tandem junction cells. Excellent light incoupling results in a remarkable summed short-circuit current density of 25.9 mA/cm 2 for amorphous top cell and microcrystalline bottom cell thicknesses of only 250 and 1100 nm, respectively. As efforts to maximize light harvesting continue, our study validates nanoimprinting as a versatile tool to investigate nanophotonic effects of a large variety of nanostructures directly on device performance.

Original languageEnglish (US)
Pages (from-to)661-665
Number of pages5
JournalNano Letters
Issue number2
StatePublished - Feb 9 2011
Externally publishedYes


  • Photovoltaics
  • light trapping
  • micromorph tandem junction
  • nanoimprinting
  • thin-film silicon solar cells

ASJC Scopus subject areas

  • Bioengineering
  • General Chemistry
  • General Materials Science
  • Condensed Matter Physics
  • Mechanical Engineering


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