Nanoscale gadolinium oxide capping layers on compositionally variant gate dielectrics

Keyphrases

• Gadolinium Oxide 100%
• Interfacial Layer 50%
• Capping Layer Effect 50%
• Maximum Process 50%
• Metal Gate Work Function 50%
• Work Function Tuning 50%
• Function Enhancement 50%
• Oxide Content 50%
• Lanthanides 50%

Engineering

• Gate Dielectric 100%
• Capping Layer 100%
• Nanoscale 100%
• Metal Gate 33%
• Interfacial Layer 33%
• Thermal Process 33%
• Dielectrics 33%
• Silicon Oxide 33%

Material Science

• Dielectric Material 100%
• Gadolinium 100%
• Oxide Compound 100%
• Lanthanide Series 33%