Nanoscale microwave microscopy using shielded cantilever probes

Keji Lai, Worasom Kundhikanjana, Michael A. Kelly, Zhi-Xun Shen

Research output: Contribution to journalArticlepeer-review

74 Scopus citations


Quantitative dielectric and conductivity mapping in the nanoscale is highly desirable for many research disciplines, but difficult to achieve through conventional transport or established microscopy techniques. Taking advantage of the micro-fabrication technology, we have developed cantilever-based near-field microwave probes with shielded structures. Sensitive microwave electronics and finite-element analysis modeling are also utilized for quantitative electrical imaging. The system is fully compatible with atomic force microscope platforms for convenient operation and easy integration of other modes and functions. The microscope is ideal for interdisciplinary research, with demonstrated examples in nano electronics, physics, material science, and biology.
Original languageEnglish (US)
Pages (from-to)13-18
Number of pages6
JournalApplied Nanoscience
Issue number1
StatePublished - Apr 21 2011
Externally publishedYes


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