A new approach to imaging via chemical amplification based on polymeric materials which undergo acid-catalyzed thermolysis is described. A key feature of the novel resist materials is their ability of form stable latent images upon exposure in the deep UV; positive tone image development is then accomplished through a low temperature thermal step. The new imaging system consists of polycarbonates containing active structures such as tertiary diols used in combination with certain onium salts which can generate strong acid upon exposure. The polycarbonates are prepared by polycondensation of carbonate activated tertiary diols with bisphenol A or other bifunctional alcohols under phase-transfer conditions. Thermolysis or acidolysis of the polycarbonates results in the clean formation of volatile materials without any solid residue. Imaging of 1 mu m thick films of projection printing is reported.
|Original language||English (US)|
|Number of pages||6|
|Journal||Journal of Imaging Science|
|State||Published - Mar 1986|
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