NEW UV RESISTS WITH NEGATIVE OR POSITIVE TONE.

Hiroshi Ito^*, C. Grant Willson, Jean M.J. Frechet

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

Original language	English (US)
Pages (from-to)	86-87
Number of pages	2
Journal	Digest of Technical Papers - Symposium on VLSI Technology
State	Published - 1982
Externally published	Yes

ASJC Scopus subject areas

@article{ab8cc4b513314359a57cd6d7cca83400,

title = "NEW UV RESISTS WITH NEGATIVE OR POSITIVE TONE.",

author = "Hiroshi Ito and Willson, {C. Grant} and Frechet, {Jean M.J.}",

year = "1982",

language = "English (US)",

pages = "86--87",

journal = "Digest of Technical Papers - Symposium on VLSI Technology",

issn = "0743-1562",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

TY - JOUR

T1 - NEW UV RESISTS WITH NEGATIVE OR POSITIVE TONE.

AU - Ito, Hiroshi

AU - Willson, C. Grant

AU - Frechet, Jean M.J.

PY - 1982

Y1 - 1982

UR - http://www.scopus.com/inward/record.url?scp=0020223497&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0020223497

SN - 0743-1562

SP - 86

EP - 87

JO - Digest of Technical Papers - Symposium on VLSI Technology

JF - Digest of Technical Papers - Symposium on VLSI Technology

ER -