TY - GEN
T1 - Nonlinear-based switch triggered by gas using electrostatically actuated microbeams
AU - Bouchaala, Adam
AU - Yassine, Omar
AU - Eddaoudi, Mohamed
AU - Jaber, Nizar
AU - Shekhah, Osama
AU - Younis, Mohammad I.
N1 - Publisher Copyright:
Copyright © 2016 by ASME.
PY - 2016
Y1 - 2016
N2 - The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a Metal-Organic Framework (MOF), namely HKUST-1 to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming.
AB - The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a Metal-Organic Framework (MOF), namely HKUST-1 to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming.
UR - http://www.scopus.com/inward/record.url?scp=85007354208&partnerID=8YFLogxK
U2 - 10.1115/DETC2016-59815.pdf
DO - 10.1115/DETC2016-59815.pdf
M3 - Conference contribution
AN - SCOPUS:85007354208
T3 - Proceedings of the ASME Design Engineering Technical Conference
BT - 21st Design for Manufacturing and the Life Cycle Conference; 10th International Conference on Micro- and Nanosystems
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 2016 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2016
Y2 - 21 August 2016 through 24 August 2016
ER -