Nonparametric Identification of a Nonlinear MEMS Resonator

Rodrigo Tumolin Rocha, Feras Alfosail, Wen Zhao, Mohammad I. Younis, Sami F. Masri

Research output: Chapter in Book/Report/Conference proceedingConference contribution


This work presents a nonparametric identification method applied to study the nonlinear response of an MEMS resonator. The MEMS resonator is a clamped-clamped microbeam fabricated for out-of-plane motion accounting for geometric nonlinearities due to midplane stretching while actuated by electrostatic forces. Experimental measurements show hardening behavior in the frequency-response of the first symmetric mode of the resonator due to the dominant cubic nonlinearity. Modeling the dynamics of the microbeam using a nonparametric identification method is shown to be very effective in capturing the characteristics of the complex nonlinear system at electrostatic AC and DC voltages.
Original languageEnglish (US)
Title of host publicationNODYCON Conference Proceedings Series
PublisherSpringer International Publishing
Number of pages11
ISBN (Print)9783030811655
StatePublished - Jan 1 2022


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