TY - JOUR
T1 - Note: Fabrication of a fast-response and user-friendly environmental chamber for atomic force microscopes
AU - Ji, Yanfeng
AU - Hui, Fei
AU - Shi, Yuanyuan
AU - Han, Tingting
AU - Song, Xiaoxue
AU - Pan, Chengbin
AU - Lanza, Mario
N1 - Generated from Scopus record by KAUST IRTS on 2021-03-16
PY - 2015/10/1
Y1 - 2015/10/1
N2 - The atomic force microscope is one of the most widespread tools in science, but many suppliers do not provide a competitive solution to make experiments in controlled atmospheres. Here, we provide a solution to this problem by fabricating a fast-response and user-friendly environmental chamber. We corroborate the correct functioning of the chamber by studying the formation of local anodic oxidation on a silicon sample (biased under opposite polarities), an effect that can be suppressed by measuring in a dry nitrogen atmosphere. The usefulness of this chamber goes beyond the example here presented, and it could be used in many other fields of science, including physics, mechanics, microelectronics, nanotechnology, medicine, and biology.
AB - The atomic force microscope is one of the most widespread tools in science, but many suppliers do not provide a competitive solution to make experiments in controlled atmospheres. Here, we provide a solution to this problem by fabricating a fast-response and user-friendly environmental chamber. We corroborate the correct functioning of the chamber by studying the formation of local anodic oxidation on a silicon sample (biased under opposite polarities), an effect that can be suppressed by measuring in a dry nitrogen atmosphere. The usefulness of this chamber goes beyond the example here presented, and it could be used in many other fields of science, including physics, mechanics, microelectronics, nanotechnology, medicine, and biology.
UR - http://aip.scitation.org/doi/10.1063/1.4932965
UR - http://www.scopus.com/inward/record.url?scp=84944067424&partnerID=8YFLogxK
U2 - 10.1063/1.4932965
DO - 10.1063/1.4932965
M3 - Article
SN - 1089-7623
VL - 86
JO - Review of Scientific Instruments
JF - Review of Scientific Instruments
IS - 10
ER -