Novel polymer systems for deep UV microlens arrays

A. R. Mackintosh; A. J.C. Kuehne; R. A. Pethrick; B. Guilhabert; E. Gu; C. L. Lee; M. D. Dawson; G. Heliotis; D. D.C. Bradley

doi:10.1088/0022-3727/41/9/094007

Novel polymer systems for deep UV microlens arrays

A. R. Mackintosh, A. J.C. Kuehne, R. A. Pethrick, B. Guilhabert, E. Gu, C. L. Lee, M. D. Dawson, G. Heliotis, D. D.C. Bradley

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

We report for the first time a UV curable polymer with effective optical transmission below 300 nm. Through careful control of kinetics, various viscosities can be generated to optimize the film forming properties via spin coating. The transmission of the monomers and films is investigated over a spectral range which spans the 240-370 nm output of ultraviolet AlInGaN light-emitting diodes. The refractive index of the polymer has been measured by ellipsometry to give a value of 1.57 at 280 nm. Using standard lithography techniques with reactive ion etching, arrays of microlenses have been fabricated in this polymer with diameters of 30 νm and below and are characterized by atomic force microscopy and confocal microscopy. © 2008 IOP Publishing Ltd.

Original language	English (US)
Journal	Journal of Physics D: Applied Physics
Volume	41
Issue number	9
DOIs	https://doi.org/10.1088/0022-3727/41/9/094007
State	Published - May 7 2008
Externally published	Yes

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title = "Novel polymer systems for deep UV microlens arrays",

abstract = "We report for the first time a UV curable polymer with effective optical transmission below 300 nm. Through careful control of kinetics, various viscosities can be generated to optimize the film forming properties via spin coating. The transmission of the monomers and films is investigated over a spectral range which spans the 240-370 nm output of ultraviolet AlInGaN light-emitting diodes. The refractive index of the polymer has been measured by ellipsometry to give a value of 1.57 at 280 nm. Using standard lithography techniques with reactive ion etching, arrays of microlenses have been fabricated in this polymer with diameters of 30 νm and below and are characterized by atomic force microscopy and confocal microscopy. {\textcopyright} 2008 IOP Publishing Ltd.",

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AU - Mackintosh, A. R.

AU - Kuehne, A. J.C.

AU - Pethrick, R. A.

AU - Guilhabert, B.

AU - Gu, E.

AU - Lee, C. L.

AU - Dawson, M. D.

AU - Heliotis, G.

AU - Bradley, D. D.C.

N1 - Generated from Scopus record by KAUST IRTS on 2019-11-27

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Y1 - 2008/5/7

N2 - We report for the first time a UV curable polymer with effective optical transmission below 300 nm. Through careful control of kinetics, various viscosities can be generated to optimize the film forming properties via spin coating. The transmission of the monomers and films is investigated over a spectral range which spans the 240-370 nm output of ultraviolet AlInGaN light-emitting diodes. The refractive index of the polymer has been measured by ellipsometry to give a value of 1.57 at 280 nm. Using standard lithography techniques with reactive ion etching, arrays of microlenses have been fabricated in this polymer with diameters of 30 νm and below and are characterized by atomic force microscopy and confocal microscopy. © 2008 IOP Publishing Ltd.

AB - We report for the first time a UV curable polymer with effective optical transmission below 300 nm. Through careful control of kinetics, various viscosities can be generated to optimize the film forming properties via spin coating. The transmission of the monomers and films is investigated over a spectral range which spans the 240-370 nm output of ultraviolet AlInGaN light-emitting diodes. The refractive index of the polymer has been measured by ellipsometry to give a value of 1.57 at 280 nm. Using standard lithography techniques with reactive ion etching, arrays of microlenses have been fabricated in this polymer with diameters of 30 νm and below and are characterized by atomic force microscopy and confocal microscopy. © 2008 IOP Publishing Ltd.

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JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

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Novel polymer systems for deep UV microlens arrays

Abstract

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