Off-axis low coherence interferometry for surface topology measurement

Yves Delacrétaz; Daniel Boss; Florian Lang; Christian Depeursinge

doi:10.1117/12.870742

Off-axis low coherence interferometry for surface topology measurement

Yves Delacrétaz^*, Daniel Boss, Florian Lang, Christian Depeursinge

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this communication we introduce a low or reduced coherence interferometry technique that can be used to retrieve surface topology on samples with high roughness. Moreover, we will show that the approach enables surface topology measurement also at the interface of so-called turbid media, where multiple scattering inside tissues can be a major issue, preventing accurate measurements.

Original language	English (US)
Title of host publication	Speckle 2010
Subtitle of host publication	Optical Metrology
DOIs	https://doi.org/10.1117/12.870742
State	Published - 2010
Externally published	Yes
Event	Speckle 2010: Optical Metrology - Florianopolis, Brazil Duration: Sep 13 2010 → Sep 15 2010

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7387
ISSN (Print)	0277-786X

Other

Other	Speckle 2010: Optical Metrology
Country/Territory	Brazil
City	Florianopolis
Period	09/13/10 → 09/15/10

Keywords

Low coherence
interferometry
topology measurement

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.870742

Cite this

@inproceedings{e161b86727f848e5bd6a81dc749b25d3,

title = "Off-axis low coherence interferometry for surface topology measurement",

abstract = "In this communication we introduce a low or reduced coherence interferometry technique that can be used to retrieve surface topology on samples with high roughness. Moreover, we will show that the approach enables surface topology measurement also at the interface of so-called turbid media, where multiple scattering inside tissues can be a major issue, preventing accurate measurements.",

keywords = "Low coherence, interferometry, topology measurement",

author = "Yves Delacr{\'e}taz and Daniel Boss and Florian Lang and Christian Depeursinge",

year = "2010",

doi = "10.1117/12.870742",

language = "English (US)",

isbn = "9780819476708",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Speckle 2010",

note = "Speckle 2010: Optical Metrology ; Conference date: 13-09-2010 Through 15-09-2010",

}

TY - GEN

T1 - Off-axis low coherence interferometry for surface topology measurement

AU - Delacrétaz, Yves

AU - Boss, Daniel

AU - Lang, Florian

AU - Depeursinge, Christian

PY - 2010

Y1 - 2010

N2 - In this communication we introduce a low or reduced coherence interferometry technique that can be used to retrieve surface topology on samples with high roughness. Moreover, we will show that the approach enables surface topology measurement also at the interface of so-called turbid media, where multiple scattering inside tissues can be a major issue, preventing accurate measurements.

AB - In this communication we introduce a low or reduced coherence interferometry technique that can be used to retrieve surface topology on samples with high roughness. Moreover, we will show that the approach enables surface topology measurement also at the interface of so-called turbid media, where multiple scattering inside tissues can be a major issue, preventing accurate measurements.

KW - Low coherence

KW - interferometry

KW - topology measurement

UR - http://www.scopus.com/inward/record.url?scp=78049385841&partnerID=8YFLogxK

U2 - 10.1117/12.870742

DO - 10.1117/12.870742

M3 - Conference contribution

AN - SCOPUS:78049385841

SN - 9780819476708

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Speckle 2010

T2 - Speckle 2010: Optical Metrology

Y2 - 13 September 2010 through 15 September 2010

ER -

Off-axis low coherence interferometry for surface topology measurement

Abstract

Publication series

Other

Keywords

ASJC Scopus subject areas

Access to Document

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Cite this