TY - JOUR
T1 - On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
AU - Zhang, Zilong
AU - Zhao, Wen
AU - Chen, Guo
AU - Toda, Masaya
AU - Koizumi, Satoshi
AU - Koide, Yasuo
AU - Liao, Meiyong
N1 - KAUST Repository Item: Exported on 2023-03-30
Acknowledgements: This work was supported by a Grant-in-Aid of JSPS KAKENHI (no. 20H02212, 22K18957, 15H03999), JSPS Research Fellowship (no. 22F21341), Bilateral joint research between JSPS (JPJSBP120227203) and CAS, and Nanotechnology Platform projects sponsored by the Ministry of Education, Culture, Sports, and Technology (MEXT) of Japan.
PY - 2023/3/27
Y1 - 2023/3/27
N2 - Electrically integrable, high-sensitivity, and high-reliability magnetic sensors are not yet realized at high temperatures (500 °C). In this study, an integrated on-chip single-crystal diamond (SCD) micro-electromechanical system (MEMS) magnetic transducer is demonstrated by coupling SCD with a large magnetostrictive FeGa film. The FeGa film is multifunctionalized to actuate the resonator, self-sense the external magnetic field, and electrically readout the resonance signal. The on-chip SCD MEMS transducer shows a high sensitivity of 3.2 Hz mT−1 from room temperature to 500 °C and a low noise level of 9.45 nT Hz−1/2 up to 300 °C. The minimum fluctuation of the resonance frequency is 1.9 × 10−6 at room temperature and 2.3 × 10−6 at 300 °C. An SCD MEMS resonator array with parallel electric readout is subsequently achieved, thus providing a basis for the development of magnetic image sensors. The present study facilitates the development of highly integrated on-chip MEMS resonator transducers with high performance and high thermal stability.
AB - Electrically integrable, high-sensitivity, and high-reliability magnetic sensors are not yet realized at high temperatures (500 °C). In this study, an integrated on-chip single-crystal diamond (SCD) micro-electromechanical system (MEMS) magnetic transducer is demonstrated by coupling SCD with a large magnetostrictive FeGa film. The FeGa film is multifunctionalized to actuate the resonator, self-sense the external magnetic field, and electrically readout the resonance signal. The on-chip SCD MEMS transducer shows a high sensitivity of 3.2 Hz mT−1 from room temperature to 500 °C and a low noise level of 9.45 nT Hz−1/2 up to 300 °C. The minimum fluctuation of the resonance frequency is 1.9 × 10−6 at room temperature and 2.3 × 10−6 at 300 °C. An SCD MEMS resonator array with parallel electric readout is subsequently achieved, thus providing a basis for the development of magnetic image sensors. The present study facilitates the development of highly integrated on-chip MEMS resonator transducers with high performance and high thermal stability.
UR - http://hdl.handle.net/10754/690699
UR - https://onlinelibrary.wiley.com/doi/10.1002/adfm.202300805
U2 - 10.1002/adfm.202300805
DO - 10.1002/adfm.202300805
M3 - Article
SN - 1616-301X
JO - Advanced Functional Materials
JF - Advanced Functional Materials
ER -