On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film

Zilong Zhang, Wen Zhao, Guo Chen, Masaya Toda, Satoshi Koizumi, Yasuo Koide, Meiyong Liao

Research output: Contribution to journalArticlepeer-review

9 Scopus citations


Electrically integrable, high-sensitivity, and high-reliability magnetic sensors are not yet realized at high temperatures (500 °C). In this study, an integrated on-chip single-crystal diamond (SCD) micro-electromechanical system (MEMS) magnetic transducer is demonstrated by coupling SCD with a large magnetostrictive FeGa film. The FeGa film is multifunctionalized to actuate the resonator, self-sense the external magnetic field, and electrically readout the resonance signal. The on-chip SCD MEMS transducer shows a high sensitivity of 3.2 Hz mT−1 from room temperature to 500 °C and a low noise level of 9.45 nT Hz−1/2 up to 300 °C. The minimum fluctuation of the resonance frequency is 1.9 × 10−6 at room temperature and 2.3 × 10−6 at 300 °C. An SCD MEMS resonator array with parallel electric readout is subsequently achieved, thus providing a basis for the development of magnetic image sensors. The present study facilitates the development of highly integrated on-chip MEMS resonator transducers with high performance and high thermal stability.
Original languageEnglish (US)
JournalAdvanced Functional Materials
StatePublished - Mar 27 2023

ASJC Scopus subject areas

  • Biomaterials
  • Electrochemistry
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics


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