Abstract
An on-chip photoacoustic transducer is proposed by monolithically integrating piezoelectric micromachined ultrasonic transducers (PMUTs) on metasurface lenses for applications such as single-cell metabolic photoacoustic microscopy (SCM-PAM)1 . As shown in Figure 1a, every PMUT cell has a ring-shaped top electrode, and the membrane center is transparent without piezoelectric and electrode materials. The laser beam, therefore, can travel through a PMUT cell after being focused by a metasurface lens bonded on the backside of the PMUT (see Figure.3). The on-chip photoacoustic transducer fully leverages current PMUT and metasurface technologies and does not rely on transparent piezoelectric and electrode materials like typical transparent ultrasonic transducers2 . Moreover, the on-chip photoacoustic transducer has a monolithic integrated achromatic metasurface lens (see Figure 3), which can easily and efficiently focus the visible light (wavelength range: 400-700 nm) at the same focus point. Design and process this and preliminarily test the performance of PMUT and metasurface.
Original language | English (US) |
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Title of host publication | Photons Plus Ultrasound: Imaging and Sensing 2023 |
Publisher | SPIE |
DOIs | |
State | Published - Mar 9 2023 |