Abstract
Low defect density a-plane GaN films were successfully grown by sidewall epitaxial lateral overgrowth (SELO) technology. Using this technology, a-plane GaN films with atomically flat surface were grown. The threading dislocation and stacking fault densities in the overgrown regions were lower than 10 6 cm -2 and 10 3 cm -1, respectively. We also fabricated and characterized a-plane-GaN-based LEDs using SELO technology. The light output power of a blue-green LED was shown to monotonically increase with decreasing of threading dislocation density. © 2007 WILEY-VCH Verlag GmbH & Co. KGaA.
Original language | English (US) |
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Title of host publication | Physica Status Solidi (A) Applications and Materials Science |
Pages | 2005-2009 |
Number of pages | 5 |
DOIs | |
State | Published - Jun 1 2007 |
Externally published | Yes |
ASJC Scopus subject areas
- Materials Chemistry
- Surfaces, Coatings and Films
- Surfaces and Interfaces
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering
- Condensed Matter Physics