Abstract
In this article, we report a mask-less and cleanroom-independent technique to fabricate Polydimethylsiloxane (PDMS)-based multi-depth microfluidic devices using a polystyrene (PS) mold with laser-induced multi-height bump patterns for PDMS soft-lithography. This technique offers a rapid and low-cost alternative to conventional PDMS mold creation, which requires more complicated mask-based photolithography process, and it also eliminates the cumbersome precise alignment/bonding of microchannel layers to fabricate a 3D structure [1]. This paper reports the first use of this new laser bumping technique for creating multi-height molds for soft-lithography.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 |
| Publisher | Chemical and Biological Microsystems Society |
| Pages | 656-658 |
| Number of pages | 3 |
| ISBN (Print) | 9780979806452 |
| State | Published - 2012 |
| Event | 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 - Okinawa, Japan Duration: Oct 28 2012 → Nov 1 2012 |
Other
| Other | 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 |
|---|---|
| Country/Territory | Japan |
| City | Okinawa |
| Period | 10/28/12 → 11/1/12 |
Keywords
- Bump
- Microfluidic
- Multi-depth microchannel
- PDMS
ASJC Scopus subject areas
- Chemical Engineering (miscellaneous)
- Bioengineering