Abstract
In this article, we report a mask-less and cleanroom-independent technique to fabricate Polydimethylsiloxane (PDMS)-based multi-depth microfluidic devices using a polystyrene (PS) mold with laser-induced multi-height bump patterns for PDMS soft-lithography. This technique offers a rapid and low-cost alternative to conventional PDMS mold creation, which requires more complicated mask-based photolithography process, and it also eliminates the cumbersome precise alignment/bonding of microchannel layers to fabricate a 3D structure [1]. This paper reports the first use of this new laser bumping technique for creating multi-height molds for soft-lithography.
Original language | English (US) |
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Title of host publication | Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 |
Publisher | Chemical and Biological Microsystems Society |
Pages | 656-658 |
Number of pages | 3 |
ISBN (Print) | 9780979806452 |
State | Published - 2012 |
Event | 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 - Okinawa, Japan Duration: Oct 28 2012 → Nov 1 2012 |
Other
Other | 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 |
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Country/Territory | Japan |
City | Okinawa |
Period | 10/28/12 → 11/1/12 |
Keywords
- Bump
- Microfluidic
- Multi-depth microchannel
- PDMS
ASJC Scopus subject areas
- Chemical Engineering (miscellaneous)
- Bioengineering