TY - JOUR
T1 - Out-of-plane buckled cantilever microstructures with adjustable angular positions using thermal bimorph actuation for transducer applications
AU - Carreno, Armando Arpys Arevalo
AU - Conchouso Gonzalez, David
AU - Castro, David
AU - Diaz, Marlon
AU - Foulds, Ian G.
N1 - KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: This work was supported by the King Abdullah University of Science and Technology.
PY - 2015/10/27
Y1 - 2015/10/27
N2 - The integration of thermal bimorph actuators and buckled cantilever structures to form an out-of-plane plate with adjustable angular positions is reported. This structure could be used as a platform to build other transducers such as optical micromirrors, scanning antennas, switches or low-frequency oscillators. The electromechanical characterisation has shown that these structures can adjust their angular position by 6° when they are operated using a DC source. The thermal characterisation performed by an infrared camera showed that the heat-affected zone reaches a maximum temperature of 125°C while the rest of the structure remains unaffected by the generated heat.
AB - The integration of thermal bimorph actuators and buckled cantilever structures to form an out-of-plane plate with adjustable angular positions is reported. This structure could be used as a platform to build other transducers such as optical micromirrors, scanning antennas, switches or low-frequency oscillators. The electromechanical characterisation has shown that these structures can adjust their angular position by 6° when they are operated using a DC source. The thermal characterisation performed by an infrared camera showed that the heat-affected zone reaches a maximum temperature of 125°C while the rest of the structure remains unaffected by the generated heat.
UR - http://hdl.handle.net/10754/622444
UR - https://digital-library.theiet.org/content/journals/10.1049/mnl.2015.0198
UR - http://www.scopus.com/inward/record.url?scp=84946211445&partnerID=8YFLogxK
U2 - 10.1049/mnl.2015.0198
DO - 10.1049/mnl.2015.0198
M3 - Article
SN - 1750-0443
VL - 10
SP - 545
EP - 549
JO - Micro & Nano Letters
JF - Micro & Nano Letters
IS - 10
ER -