Oxidative and carbonaceous patterning of Si surface in an organic media by scanning probe lithography

Engineering

• Si Surface 100%
• Scanning Probe Lithography 100%
• Fabrication Technique 50%
• Lateral Resolution 50%
• Nanocrystalline 50%
• Dry Etching 50%

Material Science

• Scanning Probe Lithography 100%
• Dry Etching 50%
• Raman Spectroscopy 50%
• Nanocrystalline 50%
• Oxidation Reaction 50%
• Oxide Compound 50%

Keyphrases

• Nanographite 50%
• Solvent Decomposition 50%
• Top-down Fabrication Techniques 50%
• Local Oxidation 50%