Physical properties and diffusion characteristics of CVD-grown TiSiN films

Dalaver Anjum*, Katharine Dovidenko, Serge Oktyabrsky, Eric Eisenbraun, Alain E. Kaloyeros

*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

Fingerprint

Dive into the research topics of 'Physical properties and diffusion characteristics of CVD-grown TiSiN films'. Together they form a unique fingerprint.

Engineering

Material Science

Keyphrases

Food Science